JPS52131462A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52131462A
JPS52131462A JP4888176A JP4888176A JPS52131462A JP S52131462 A JPS52131462 A JP S52131462A JP 4888176 A JP4888176 A JP 4888176A JP 4888176 A JP4888176 A JP 4888176A JP S52131462 A JPS52131462 A JP S52131462A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
oxidation
substrate
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4888176A
Other languages
Japanese (ja)
Inventor
Hiroshi Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4888176A priority Critical patent/JPS52131462A/en
Publication of JPS52131462A publication Critical patent/JPS52131462A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the complication involved in the oxidation film removal process by preventing oxidation of the substrate by covering its rear surface with Si3N4 film when giving selective oxidation on the surface of the substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP4888176A 1976-04-28 1976-04-28 Manufacture of semiconductor device Pending JPS52131462A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4888176A JPS52131462A (en) 1976-04-28 1976-04-28 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4888176A JPS52131462A (en) 1976-04-28 1976-04-28 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52131462A true JPS52131462A (en) 1977-11-04

Family

ID=12815615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4888176A Pending JPS52131462A (en) 1976-04-28 1976-04-28 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52131462A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724547A (en) * 1980-07-22 1982-02-09 Toshiba Corp Manufacture of semiconductor element
JPS58114441A (en) * 1981-12-26 1983-07-07 Fujitsu Ltd Manufacture of semiconductor device
JPS5980972A (en) * 1983-08-24 1984-05-10 Hitachi Ltd Manufacture of insulated gate type field-effect transistor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724547A (en) * 1980-07-22 1982-02-09 Toshiba Corp Manufacture of semiconductor element
JPS58114441A (en) * 1981-12-26 1983-07-07 Fujitsu Ltd Manufacture of semiconductor device
JPH0347741B2 (en) * 1981-12-26 1991-07-22 Fujitsu Ltd
JPS5980972A (en) * 1983-08-24 1984-05-10 Hitachi Ltd Manufacture of insulated gate type field-effect transistor

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