JPS5436181A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5436181A
JPS5436181A JP10233677A JP10233677A JPS5436181A JP S5436181 A JPS5436181 A JP S5436181A JP 10233677 A JP10233677 A JP 10233677A JP 10233677 A JP10233677 A JP 10233677A JP S5436181 A JPS5436181 A JP S5436181A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
thickness
semiconductor substrate
oxidation process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10233677A
Other languages
Japanese (ja)
Inventor
Koichiro Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10233677A priority Critical patent/JPS5436181A/en
Publication of JPS5436181A publication Critical patent/JPS5436181A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To form the oxide films different in thickness with the same oxidation process on the semiconductor substrate hardly oxidized.
COPYRIGHT: (C)1979,JPO&Japio
JP10233677A 1977-08-26 1977-08-26 Manufacture for semiconductor device Pending JPS5436181A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10233677A JPS5436181A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10233677A JPS5436181A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5436181A true JPS5436181A (en) 1979-03-16

Family

ID=14324661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10233677A Pending JPS5436181A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5436181A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676537A (en) * 1979-11-27 1981-06-24 Fujitsu Ltd Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676537A (en) * 1979-11-27 1981-06-24 Fujitsu Ltd Manufacture of semiconductor device
JPS6211781B2 (en) * 1979-11-27 1987-03-14 Fujitsu Ltd

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