JPS5436181A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5436181A JPS5436181A JP10233677A JP10233677A JPS5436181A JP S5436181 A JPS5436181 A JP S5436181A JP 10233677 A JP10233677 A JP 10233677A JP 10233677 A JP10233677 A JP 10233677A JP S5436181 A JPS5436181 A JP S5436181A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- thickness
- semiconductor substrate
- oxidation process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To form the oxide films different in thickness with the same oxidation process on the semiconductor substrate hardly oxidized.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10233677A JPS5436181A (en) | 1977-08-26 | 1977-08-26 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10233677A JPS5436181A (en) | 1977-08-26 | 1977-08-26 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5436181A true JPS5436181A (en) | 1979-03-16 |
Family
ID=14324661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10233677A Pending JPS5436181A (en) | 1977-08-26 | 1977-08-26 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5436181A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5676537A (en) * | 1979-11-27 | 1981-06-24 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1977
- 1977-08-26 JP JP10233677A patent/JPS5436181A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5676537A (en) * | 1979-11-27 | 1981-06-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6211781B2 (en) * | 1979-11-27 | 1987-03-14 | Fujitsu Ltd |
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