JPS5384562A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5384562A JPS5384562A JP16027776A JP16027776A JPS5384562A JP S5384562 A JPS5384562 A JP S5384562A JP 16027776 A JP16027776 A JP 16027776A JP 16027776 A JP16027776 A JP 16027776A JP S5384562 A JPS5384562 A JP S5384562A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- manufacture
- semiconductor device
- mask
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To implant the semiconductor layer in the insulating layer with flatness, by coating the semiconductor layer with the insulating film having the same thickness as the semiconductor layer and by lifting off the mask, after selctively removing the semiconductor layer on the semi-insulating substrate with the mask.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16027776A JPS5384562A (en) | 1976-12-29 | 1976-12-29 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16027776A JPS5384562A (en) | 1976-12-29 | 1976-12-29 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5384562A true JPS5384562A (en) | 1978-07-26 |
Family
ID=15711506
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16027776A Pending JPS5384562A (en) | 1976-12-29 | 1976-12-29 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5384562A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4831888A (en) * | 1971-08-30 | 1973-04-26 | ||
JPS49135578A (en) * | 1973-04-28 | 1974-12-27 | ||
JPS5021675A (en) * | 1973-06-25 | 1975-03-07 |
-
1976
- 1976-12-29 JP JP16027776A patent/JPS5384562A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4831888A (en) * | 1971-08-30 | 1973-04-26 | ||
JPS49135578A (en) * | 1973-04-28 | 1974-12-27 | ||
JPS5021675A (en) * | 1973-06-25 | 1975-03-07 |
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