JPS5384562A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5384562A
JPS5384562A JP16027776A JP16027776A JPS5384562A JP S5384562 A JPS5384562 A JP S5384562A JP 16027776 A JP16027776 A JP 16027776A JP 16027776 A JP16027776 A JP 16027776A JP S5384562 A JPS5384562 A JP S5384562A
Authority
JP
Japan
Prior art keywords
semiconductor layer
manufacture
semiconductor device
mask
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16027776A
Other languages
Japanese (ja)
Inventor
Toshio Usui
Kiyobumi Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16027776A priority Critical patent/JPS5384562A/en
Publication of JPS5384562A publication Critical patent/JPS5384562A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To implant the semiconductor layer in the insulating layer with flatness, by coating the semiconductor layer with the insulating film having the same thickness as the semiconductor layer and by lifting off the mask, after selctively removing the semiconductor layer on the semi-insulating substrate with the mask.
COPYRIGHT: (C)1978,JPO&Japio
JP16027776A 1976-12-29 1976-12-29 Manufacture for semiconductor device Pending JPS5384562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16027776A JPS5384562A (en) 1976-12-29 1976-12-29 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16027776A JPS5384562A (en) 1976-12-29 1976-12-29 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5384562A true JPS5384562A (en) 1978-07-26

Family

ID=15711506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16027776A Pending JPS5384562A (en) 1976-12-29 1976-12-29 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5384562A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831888A (en) * 1971-08-30 1973-04-26
JPS49135578A (en) * 1973-04-28 1974-12-27
JPS5021675A (en) * 1973-06-25 1975-03-07

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831888A (en) * 1971-08-30 1973-04-26
JPS49135578A (en) * 1973-04-28 1974-12-27
JPS5021675A (en) * 1973-06-25 1975-03-07

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