JPS5372482A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5372482A JPS5372482A JP14824476A JP14824476A JPS5372482A JP S5372482 A JPS5372482 A JP S5372482A JP 14824476 A JP14824476 A JP 14824476A JP 14824476 A JP14824476 A JP 14824476A JP S5372482 A JPS5372482 A JP S5372482A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- crystal semiconductor
- crystal
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the resistance of multi-crystal semiconductor and further fining the multi-crystal pattern, by diffusing impurity on the multi-crystal semiconductor and the semiconductor substrate directly in contact with this, after forming the pattern of the multi-crystal semiconductor film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14824476A JPS5372482A (en) | 1976-12-08 | 1976-12-08 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14824476A JPS5372482A (en) | 1976-12-08 | 1976-12-08 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5372482A true JPS5372482A (en) | 1978-06-27 |
Family
ID=15448451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14824476A Pending JPS5372482A (en) | 1976-12-08 | 1976-12-08 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5372482A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55165681A (en) * | 1979-06-11 | 1980-12-24 | Mitsubishi Electric Corp | Preparation of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5151279A (en) * | 1974-10-31 | 1976-05-06 | Oki Electric Ind Co Ltd | HANDOTAISHUSEKIKAIRONO SEIZOHOHO |
-
1976
- 1976-12-08 JP JP14824476A patent/JPS5372482A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5151279A (en) * | 1974-10-31 | 1976-05-06 | Oki Electric Ind Co Ltd | HANDOTAISHUSEKIKAIRONO SEIZOHOHO |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55165681A (en) * | 1979-06-11 | 1980-12-24 | Mitsubishi Electric Corp | Preparation of semiconductor device |
JPH0456456B2 (en) * | 1979-06-11 | 1992-09-08 | Mitsubishi Electric Corp |
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