JPS5380160A - Manufacture of substrate for semiconductor device - Google Patents
Manufacture of substrate for semiconductor deviceInfo
- Publication number
- JPS5380160A JPS5380160A JP15724576A JP15724576A JPS5380160A JP S5380160 A JPS5380160 A JP S5380160A JP 15724576 A JP15724576 A JP 15724576A JP 15724576 A JP15724576 A JP 15724576A JP S5380160 A JPS5380160 A JP S5380160A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- single crystal
- crystal thin
- thin film
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To evade the auto-doping toward a semiconductor single crystal thin film by interposing another insulator single crystal thin film of small in dffusion coefficient against the composition element of an insulator substrate in case of the growth of the semiconductor single crystal thin film on the insulator single crystal thin substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15724576A JPS5380160A (en) | 1976-12-24 | 1976-12-24 | Manufacture of substrate for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15724576A JPS5380160A (en) | 1976-12-24 | 1976-12-24 | Manufacture of substrate for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5380160A true JPS5380160A (en) | 1978-07-15 |
Family
ID=15645408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15724576A Pending JPS5380160A (en) | 1976-12-24 | 1976-12-24 | Manufacture of substrate for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5380160A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61214476A (en) * | 1985-03-19 | 1986-09-24 | Agency Of Ind Science & Technol | Thin-film transistor |
US5123975A (en) * | 1989-03-28 | 1992-06-23 | Ricoh Company, Ltd. | Single crystal silicon substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918430A (en) * | 1972-06-09 | 1974-02-18 |
-
1976
- 1976-12-24 JP JP15724576A patent/JPS5380160A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918430A (en) * | 1972-06-09 | 1974-02-18 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61214476A (en) * | 1985-03-19 | 1986-09-24 | Agency Of Ind Science & Technol | Thin-film transistor |
JPH055186B2 (en) * | 1985-03-19 | 1993-01-21 | Kogyo Gijutsu Incho | |
US5123975A (en) * | 1989-03-28 | 1992-06-23 | Ricoh Company, Ltd. | Single crystal silicon substrate |
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