JPS5380160A - Manufacture of substrate for semiconductor device - Google Patents

Manufacture of substrate for semiconductor device

Info

Publication number
JPS5380160A
JPS5380160A JP15724576A JP15724576A JPS5380160A JP S5380160 A JPS5380160 A JP S5380160A JP 15724576 A JP15724576 A JP 15724576A JP 15724576 A JP15724576 A JP 15724576A JP S5380160 A JPS5380160 A JP S5380160A
Authority
JP
Japan
Prior art keywords
substrate
single crystal
crystal thin
thin film
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15724576A
Other languages
Japanese (ja)
Inventor
Shinobu Fukunaga
Hidenobu Ishikura
Masahiko Yasuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15724576A priority Critical patent/JPS5380160A/en
Publication of JPS5380160A publication Critical patent/JPS5380160A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To evade the auto-doping toward a semiconductor single crystal thin film by interposing another insulator single crystal thin film of small in dffusion coefficient against the composition element of an insulator substrate in case of the growth of the semiconductor single crystal thin film on the insulator single crystal thin substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP15724576A 1976-12-24 1976-12-24 Manufacture of substrate for semiconductor device Pending JPS5380160A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15724576A JPS5380160A (en) 1976-12-24 1976-12-24 Manufacture of substrate for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15724576A JPS5380160A (en) 1976-12-24 1976-12-24 Manufacture of substrate for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5380160A true JPS5380160A (en) 1978-07-15

Family

ID=15645408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15724576A Pending JPS5380160A (en) 1976-12-24 1976-12-24 Manufacture of substrate for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5380160A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214476A (en) * 1985-03-19 1986-09-24 Agency Of Ind Science & Technol Thin-film transistor
US5123975A (en) * 1989-03-28 1992-06-23 Ricoh Company, Ltd. Single crystal silicon substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918430A (en) * 1972-06-09 1974-02-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918430A (en) * 1972-06-09 1974-02-18

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214476A (en) * 1985-03-19 1986-09-24 Agency Of Ind Science & Technol Thin-film transistor
JPH055186B2 (en) * 1985-03-19 1993-01-21 Kogyo Gijutsu Incho
US5123975A (en) * 1989-03-28 1992-06-23 Ricoh Company, Ltd. Single crystal silicon substrate

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