JPS5380985A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5380985A
JPS5380985A JP15705476A JP15705476A JPS5380985A JP S5380985 A JPS5380985 A JP S5380985A JP 15705476 A JP15705476 A JP 15705476A JP 15705476 A JP15705476 A JP 15705476A JP S5380985 A JPS5380985 A JP S5380985A
Authority
JP
Japan
Prior art keywords
semiconductor device
wiring
electrode
silicide
resisting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15705476A
Other languages
Japanese (ja)
Inventor
Kenji Shibata
Toru Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15705476A priority Critical patent/JPS5380985A/en
Publication of JPS5380985A publication Critical patent/JPS5380985A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Conductive Materials (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To form a wiring and electrode featuring a high acid-resisting, a high stability and a high adhesion performance, by using a silicide of 95-50 wt.% Mo and the rest Si for the element wiring or the electrode material on the semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP15705476A 1976-12-25 1976-12-25 Semiconductor device Pending JPS5380985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15705476A JPS5380985A (en) 1976-12-25 1976-12-25 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15705476A JPS5380985A (en) 1976-12-25 1976-12-25 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5380985A true JPS5380985A (en) 1978-07-17

Family

ID=15641187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15705476A Pending JPS5380985A (en) 1976-12-25 1976-12-25 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5380985A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413283A (en) * 1977-06-30 1979-01-31 Ibm Method of forming metal silicide layer on substrate
JPS57194567A (en) * 1981-05-27 1982-11-30 Hitachi Ltd Semiconductor memory device
JPS6014852U (en) * 1983-07-07 1985-01-31 屋敷　静雄 Driver with sliding door
JPS6486551A (en) * 1988-05-27 1989-03-31 Hitachi Ltd Semiconductor storage device
JPH0198255A (en) * 1988-05-27 1989-04-17 Hitachi Ltd Semiconductor memory
JPH0198256A (en) * 1988-05-27 1989-04-17 Hitachi Ltd Semiconductor memory

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015550A (en) * 1973-06-08 1975-02-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015550A (en) * 1973-06-08 1975-02-19

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413283A (en) * 1977-06-30 1979-01-31 Ibm Method of forming metal silicide layer on substrate
JPS5852342B2 (en) * 1977-06-30 1983-11-22 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション Method of providing a layer of silicided metal on a substrate
JPS57194567A (en) * 1981-05-27 1982-11-30 Hitachi Ltd Semiconductor memory device
JPS6014852U (en) * 1983-07-07 1985-01-31 屋敷　静雄 Driver with sliding door
JPS6486551A (en) * 1988-05-27 1989-03-31 Hitachi Ltd Semiconductor storage device
JPH0198255A (en) * 1988-05-27 1989-04-17 Hitachi Ltd Semiconductor memory
JPH0198256A (en) * 1988-05-27 1989-04-17 Hitachi Ltd Semiconductor memory

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