JPS53118990A - Manufacture for resistor - Google Patents

Manufacture for resistor

Info

Publication number
JPS53118990A
JPS53118990A JP3332877A JP3332877A JPS53118990A JP S53118990 A JPS53118990 A JP S53118990A JP 3332877 A JP3332877 A JP 3332877A JP 3332877 A JP3332877 A JP 3332877A JP S53118990 A JPS53118990 A JP S53118990A
Authority
JP
Japan
Prior art keywords
resistor
manufacture
thick
implanting
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3332877A
Other languages
Japanese (ja)
Inventor
Kenji Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3332877A priority Critical patent/JPS53118990A/en
Publication of JPS53118990A publication Critical patent/JPS53118990A/en
Pending legal-status Critical Current

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  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To manufacture the resistor by ion-implanting on the Si thick film more than 3000Å thick formed on the insulating film of the semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP3332877A 1977-03-28 1977-03-28 Manufacture for resistor Pending JPS53118990A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3332877A JPS53118990A (en) 1977-03-28 1977-03-28 Manufacture for resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3332877A JPS53118990A (en) 1977-03-28 1977-03-28 Manufacture for resistor

Publications (1)

Publication Number Publication Date
JPS53118990A true JPS53118990A (en) 1978-10-17

Family

ID=12383478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3332877A Pending JPS53118990A (en) 1977-03-28 1977-03-28 Manufacture for resistor

Country Status (1)

Country Link
JP (1) JPS53118990A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114853U (en) * 1985-12-24 1986-07-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114853U (en) * 1985-12-24 1986-07-19

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