JPS5295969A - Insulating base material - Google Patents

Insulating base material

Info

Publication number
JPS5295969A
JPS5295969A JP1227276A JP1227276A JPS5295969A JP S5295969 A JPS5295969 A JP S5295969A JP 1227276 A JP1227276 A JP 1227276A JP 1227276 A JP1227276 A JP 1227276A JP S5295969 A JPS5295969 A JP S5295969A
Authority
JP
Japan
Prior art keywords
insulating base
base material
base plate
plate
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1227276A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Junpei Kodaira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1227276A priority Critical patent/JPS5295969A/en
Publication of JPS5295969A publication Critical patent/JPS5295969A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent auto-doping owing to base plate at the time of epigrowth by forming the insulating film different from the insulating base plate which contains Al on this plate.
COPYRIGHT: (C)1977,JPO&Japio
JP1227276A 1976-02-09 1976-02-09 Insulating base material Pending JPS5295969A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1227276A JPS5295969A (en) 1976-02-09 1976-02-09 Insulating base material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1227276A JPS5295969A (en) 1976-02-09 1976-02-09 Insulating base material

Publications (1)

Publication Number Publication Date
JPS5295969A true JPS5295969A (en) 1977-08-12

Family

ID=11800719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1227276A Pending JPS5295969A (en) 1976-02-09 1976-02-09 Insulating base material

Country Status (1)

Country Link
JP (1) JPS5295969A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518038A (en) * 1978-07-24 1980-02-07 Nec Corp Substrate for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518038A (en) * 1978-07-24 1980-02-07 Nec Corp Substrate for semiconductor device

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