JPS53135269A - Forming method for electrode to semiconductor surface - Google Patents
Forming method for electrode to semiconductor surfaceInfo
- Publication number
- JPS53135269A JPS53135269A JP5043377A JP5043377A JPS53135269A JP S53135269 A JPS53135269 A JP S53135269A JP 5043377 A JP5043377 A JP 5043377A JP 5043377 A JP5043377 A JP 5043377A JP S53135269 A JPS53135269 A JP S53135269A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- forming method
- semiconductor surface
- substitution
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To make Zn substitution easy to form an ohmic electrode by providing the Al evaporated film over 5μ on the substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5043377A JPS53135269A (en) | 1977-04-30 | 1977-04-30 | Forming method for electrode to semiconductor surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5043377A JPS53135269A (en) | 1977-04-30 | 1977-04-30 | Forming method for electrode to semiconductor surface |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53135269A true JPS53135269A (en) | 1978-11-25 |
Family
ID=12858725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5043377A Pending JPS53135269A (en) | 1977-04-30 | 1977-04-30 | Forming method for electrode to semiconductor surface |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53135269A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5246764A (en) * | 1975-10-09 | 1977-04-13 | Mitsubishi Electric Corp | Method of forming metal electrode on semiconductor substrate |
-
1977
- 1977-04-30 JP JP5043377A patent/JPS53135269A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5246764A (en) * | 1975-10-09 | 1977-04-13 | Mitsubishi Electric Corp | Method of forming metal electrode on semiconductor substrate |
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