JPS533168A - Semiconductor evaporating apparatus - Google Patents
Semiconductor evaporating apparatusInfo
- Publication number
- JPS533168A JPS533168A JP7656876A JP7656876A JPS533168A JP S533168 A JPS533168 A JP S533168A JP 7656876 A JP7656876 A JP 7656876A JP 7656876 A JP7656876 A JP 7656876A JP S533168 A JPS533168 A JP S533168A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- evaporating apparatus
- semiconductor wafers
- wafers
- jar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To make the thickness of the thin film formed on semiconductor wafers perfectly even by not only rotatively moving the position of the semiconductor wafers within a bell-jar but also rotating the wafers themselves.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7656876A JPS533168A (en) | 1976-06-30 | 1976-06-30 | Semiconductor evaporating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7656876A JPS533168A (en) | 1976-06-30 | 1976-06-30 | Semiconductor evaporating apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS533168A true JPS533168A (en) | 1978-01-12 |
Family
ID=13608825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7656876A Pending JPS533168A (en) | 1976-06-30 | 1976-06-30 | Semiconductor evaporating apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS533168A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02279819A (en) * | 1989-04-20 | 1990-11-15 | Kurosawa Kensetsu Kk | Installation of underground anchor |
JPH03235812A (en) * | 1990-02-13 | 1991-10-21 | Kurosawa Kensetsu Kk | Underground earth removal anchor establishment method |
-
1976
- 1976-06-30 JP JP7656876A patent/JPS533168A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02279819A (en) * | 1989-04-20 | 1990-11-15 | Kurosawa Kensetsu Kk | Installation of underground anchor |
JPH03235812A (en) * | 1990-02-13 | 1991-10-21 | Kurosawa Kensetsu Kk | Underground earth removal anchor establishment method |
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