JPS533168A - Semiconductor evaporating apparatus - Google Patents

Semiconductor evaporating apparatus

Info

Publication number
JPS533168A
JPS533168A JP7656876A JP7656876A JPS533168A JP S533168 A JPS533168 A JP S533168A JP 7656876 A JP7656876 A JP 7656876A JP 7656876 A JP7656876 A JP 7656876A JP S533168 A JPS533168 A JP S533168A
Authority
JP
Japan
Prior art keywords
semiconductor
evaporating apparatus
semiconductor wafers
wafers
jar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7656876A
Other languages
Japanese (ja)
Inventor
Toshihiko Ono
Kazuo Tanaka
Kenichi Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7656876A priority Critical patent/JPS533168A/en
Publication of JPS533168A publication Critical patent/JPS533168A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To make the thickness of the thin film formed on semiconductor wafers perfectly even by not only rotatively moving the position of the semiconductor wafers within a bell-jar but also rotating the wafers themselves.
COPYRIGHT: (C)1978,JPO&Japio
JP7656876A 1976-06-30 1976-06-30 Semiconductor evaporating apparatus Pending JPS533168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7656876A JPS533168A (en) 1976-06-30 1976-06-30 Semiconductor evaporating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7656876A JPS533168A (en) 1976-06-30 1976-06-30 Semiconductor evaporating apparatus

Publications (1)

Publication Number Publication Date
JPS533168A true JPS533168A (en) 1978-01-12

Family

ID=13608825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7656876A Pending JPS533168A (en) 1976-06-30 1976-06-30 Semiconductor evaporating apparatus

Country Status (1)

Country Link
JP (1) JPS533168A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02279819A (en) * 1989-04-20 1990-11-15 Kurosawa Kensetsu Kk Installation of underground anchor
JPH03235812A (en) * 1990-02-13 1991-10-21 Kurosawa Kensetsu Kk Underground earth removal anchor establishment method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02279819A (en) * 1989-04-20 1990-11-15 Kurosawa Kensetsu Kk Installation of underground anchor
JPH03235812A (en) * 1990-02-13 1991-10-21 Kurosawa Kensetsu Kk Underground earth removal anchor establishment method

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