JPS5421257A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5421257A
JPS5421257A JP8683777A JP8683777A JPS5421257A JP S5421257 A JPS5421257 A JP S5421257A JP 8683777 A JP8683777 A JP 8683777A JP 8683777 A JP8683777 A JP 8683777A JP S5421257 A JPS5421257 A JP S5421257A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
scrive
development
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8683777A
Other languages
Japanese (ja)
Inventor
Yoshio Takagi
Kunihiro Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8683777A priority Critical patent/JPS5421257A/en
Publication of JPS5421257A publication Critical patent/JPS5421257A/en
Pending legal-status Critical Current

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  • Dicing (AREA)

Abstract

PURPOSE: To block the development of cut strain, by providing oxide films at the both sides bridging groove forming region, when placing opening for scrive groove formation on the oxide film coated on a semiconductor substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP8683777A 1977-07-19 1977-07-19 Manufacture for semiconductor device Pending JPS5421257A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8683777A JPS5421257A (en) 1977-07-19 1977-07-19 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8683777A JPS5421257A (en) 1977-07-19 1977-07-19 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5421257A true JPS5421257A (en) 1979-02-17

Family

ID=13897913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8683777A Pending JPS5421257A (en) 1977-07-19 1977-07-19 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5421257A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834738U (en) * 1981-08-31 1983-03-07 日本電気ホームエレクトロニクス株式会社 semiconductor wafer
JPS58166741A (en) * 1982-03-29 1983-10-01 Fuji Electric Co Ltd Manufacture of semiconductor element
JPS61156238U (en) * 1985-03-18 1986-09-27

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834359A (en) * 1971-09-06 1973-05-18
JPS4860871A (en) * 1971-11-30 1973-08-25
JPS4882771A (en) * 1972-02-04 1973-11-05
JPS4976467A (en) * 1972-11-11 1974-07-23
JPS5054281A (en) * 1973-09-11 1975-05-13

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834359A (en) * 1971-09-06 1973-05-18
JPS4860871A (en) * 1971-11-30 1973-08-25
JPS4882771A (en) * 1972-02-04 1973-11-05
JPS4976467A (en) * 1972-11-11 1974-07-23
JPS5054281A (en) * 1973-09-11 1975-05-13

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834738U (en) * 1981-08-31 1983-03-07 日本電気ホームエレクトロニクス株式会社 semiconductor wafer
JPS58166741A (en) * 1982-03-29 1983-10-01 Fuji Electric Co Ltd Manufacture of semiconductor element
JPS61156238U (en) * 1985-03-18 1986-09-27
JPH0219962Y2 (en) * 1985-03-18 1990-05-31

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