JPS5421257A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5421257A JPS5421257A JP8683777A JP8683777A JPS5421257A JP S5421257 A JPS5421257 A JP S5421257A JP 8683777 A JP8683777 A JP 8683777A JP 8683777 A JP8683777 A JP 8683777A JP S5421257 A JPS5421257 A JP S5421257A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- scrive
- development
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Abstract
PURPOSE: To block the development of cut strain, by providing oxide films at the both sides bridging groove forming region, when placing opening for scrive groove formation on the oxide film coated on a semiconductor substrate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8683777A JPS5421257A (en) | 1977-07-19 | 1977-07-19 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8683777A JPS5421257A (en) | 1977-07-19 | 1977-07-19 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5421257A true JPS5421257A (en) | 1979-02-17 |
Family
ID=13897913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8683777A Pending JPS5421257A (en) | 1977-07-19 | 1977-07-19 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5421257A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5834738U (en) * | 1981-08-31 | 1983-03-07 | 日本電気ホームエレクトロニクス株式会社 | semiconductor wafer |
JPS58166741A (en) * | 1982-03-29 | 1983-10-01 | Fuji Electric Co Ltd | Manufacture of semiconductor element |
JPS61156238U (en) * | 1985-03-18 | 1986-09-27 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834359A (en) * | 1971-09-06 | 1973-05-18 | ||
JPS4860871A (en) * | 1971-11-30 | 1973-08-25 | ||
JPS4882771A (en) * | 1972-02-04 | 1973-11-05 | ||
JPS4976467A (en) * | 1972-11-11 | 1974-07-23 | ||
JPS5054281A (en) * | 1973-09-11 | 1975-05-13 |
-
1977
- 1977-07-19 JP JP8683777A patent/JPS5421257A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834359A (en) * | 1971-09-06 | 1973-05-18 | ||
JPS4860871A (en) * | 1971-11-30 | 1973-08-25 | ||
JPS4882771A (en) * | 1972-02-04 | 1973-11-05 | ||
JPS4976467A (en) * | 1972-11-11 | 1974-07-23 | ||
JPS5054281A (en) * | 1973-09-11 | 1975-05-13 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5834738U (en) * | 1981-08-31 | 1983-03-07 | 日本電気ホームエレクトロニクス株式会社 | semiconductor wafer |
JPS58166741A (en) * | 1982-03-29 | 1983-10-01 | Fuji Electric Co Ltd | Manufacture of semiconductor element |
JPS61156238U (en) * | 1985-03-18 | 1986-09-27 | ||
JPH0219962Y2 (en) * | 1985-03-18 | 1990-05-31 |
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