JPS543471A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS543471A JPS543471A JP6790377A JP6790377A JPS543471A JP S543471 A JPS543471 A JP S543471A JP 6790377 A JP6790377 A JP 6790377A JP 6790377 A JP6790377 A JP 6790377A JP S543471 A JPS543471 A JP S543471A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- insulator
- groove
- projection part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Bipolar Transistors (AREA)
- Weting (AREA)
Abstract
PURPOSE: To remove selectively the insulator film at the projection part and then to form the semiconductor element there for the insulator substrate of the semiconductor substrate to which the groove is provided locally, by coating the insulator films of different properties to the inside of the groove and to the projection part and then utilizing the difference between these two properties.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6790377A JPS543471A (en) | 1977-06-10 | 1977-06-10 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6790377A JPS543471A (en) | 1977-06-10 | 1977-06-10 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS543471A true JPS543471A (en) | 1979-01-11 |
Family
ID=13358310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6790377A Pending JPS543471A (en) | 1977-06-10 | 1977-06-10 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS543471A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01184816A (en) * | 1988-01-13 | 1989-07-24 | Sanyo Electric Co Ltd | Soi forming method |
-
1977
- 1977-06-10 JP JP6790377A patent/JPS543471A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01184816A (en) * | 1988-01-13 | 1989-07-24 | Sanyo Electric Co Ltd | Soi forming method |
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