JPS543471A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS543471A
JPS543471A JP6790377A JP6790377A JPS543471A JP S543471 A JPS543471 A JP S543471A JP 6790377 A JP6790377 A JP 6790377A JP 6790377 A JP6790377 A JP 6790377A JP S543471 A JPS543471 A JP S543471A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
insulator
groove
projection part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6790377A
Other languages
Japanese (ja)
Inventor
Mitsuo Nanba
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6790377A priority Critical patent/JPS543471A/en
Publication of JPS543471A publication Critical patent/JPS543471A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To remove selectively the insulator film at the projection part and then to form the semiconductor element there for the insulator substrate of the semiconductor substrate to which the groove is provided locally, by coating the insulator films of different properties to the inside of the groove and to the projection part and then utilizing the difference between these two properties.
COPYRIGHT: (C)1979,JPO&Japio
JP6790377A 1977-06-10 1977-06-10 Manufacture of semiconductor device Pending JPS543471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6790377A JPS543471A (en) 1977-06-10 1977-06-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6790377A JPS543471A (en) 1977-06-10 1977-06-10 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS543471A true JPS543471A (en) 1979-01-11

Family

ID=13358310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6790377A Pending JPS543471A (en) 1977-06-10 1977-06-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS543471A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01184816A (en) * 1988-01-13 1989-07-24 Sanyo Electric Co Ltd Soi forming method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01184816A (en) * 1988-01-13 1989-07-24 Sanyo Electric Co Ltd Soi forming method

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