JPS5258472A - Selective oxidation - Google Patents

Selective oxidation

Info

Publication number
JPS5258472A
JPS5258472A JP13408075A JP13408075A JPS5258472A JP S5258472 A JPS5258472 A JP S5258472A JP 13408075 A JP13408075 A JP 13408075A JP 13408075 A JP13408075 A JP 13408075A JP S5258472 A JPS5258472 A JP S5258472A
Authority
JP
Japan
Prior art keywords
selective oxidation
oxide film
nitride film
integration
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13408075A
Other languages
Japanese (ja)
Inventor
Tadao Kachi
Osamu Yumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13408075A priority Critical patent/JPS5258472A/en
Publication of JPS5258472A publication Critical patent/JPS5258472A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To prevent the outward spreading of the circumferential part of the formed oxide film surface and increase the scale of integration by subsequently forming a nitride film. oxide film and nitride film of such a thickness as not to cause cracking on the surface of a semiconductor substrate and making selective oxidation by using these films as a mask.
COPYRIGHT: (C)1977,JPO&Japio
JP13408075A 1975-11-10 1975-11-10 Selective oxidation Pending JPS5258472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13408075A JPS5258472A (en) 1975-11-10 1975-11-10 Selective oxidation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13408075A JPS5258472A (en) 1975-11-10 1975-11-10 Selective oxidation

Publications (1)

Publication Number Publication Date
JPS5258472A true JPS5258472A (en) 1977-05-13

Family

ID=15119921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13408075A Pending JPS5258472A (en) 1975-11-10 1975-11-10 Selective oxidation

Country Status (1)

Country Link
JP (1) JPS5258472A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150138U (en) * 1976-05-11 1977-11-14
JPS54128281A (en) * 1978-03-29 1979-10-04 Hitachi Ltd Selecting process mask
JP2016522994A (en) * 2013-05-16 2016-08-04 ケー．エクランド イノベーション Insulated gate bipolar transistor amplifier circuit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150138U (en) * 1976-05-11 1977-11-14
JPS5620309Y2 (en) * 1976-05-11 1981-05-14
JPS54128281A (en) * 1978-03-29 1979-10-04 Hitachi Ltd Selecting process mask
JP2016522994A (en) * 2013-05-16 2016-08-04 ケー．エクランド イノベーション Insulated gate bipolar transistor amplifier circuit

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