JPS5244795A - Formation of silicon nitride film - Google Patents
Formation of silicon nitride filmInfo
- Publication number
- JPS5244795A JPS5244795A JP12068175A JP12068175A JPS5244795A JP S5244795 A JPS5244795 A JP S5244795A JP 12068175 A JP12068175 A JP 12068175A JP 12068175 A JP12068175 A JP 12068175A JP S5244795 A JPS5244795 A JP S5244795A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- nitride film
- formation
- film
- cracking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE: To prevent silicon nitride film from cracking when thermal oxidation film is formed using silicon nitride mask by heat treatment on the prescribed surface of semiconductor substrate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12068175A JPS5244795A (en) | 1975-10-08 | 1975-10-08 | Formation of silicon nitride film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12068175A JPS5244795A (en) | 1975-10-08 | 1975-10-08 | Formation of silicon nitride film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5244795A true JPS5244795A (en) | 1977-04-08 |
Family
ID=14792302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12068175A Pending JPS5244795A (en) | 1975-10-08 | 1975-10-08 | Formation of silicon nitride film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5244795A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54136377U (en) * | 1978-03-15 | 1979-09-21 | ||
JPS61159576A (en) * | 1984-12-21 | 1986-07-19 | アドバンスト・マイクロ・ディバイシズ・インコーポレーテッド | Formation of silicon nitride film transparent to ultravioletrays |
US5741528A (en) * | 1994-08-25 | 1998-04-21 | Kabushiki Kaisha Kobe Seiko Sho | Tire vulcanizing system |
US5820885A (en) * | 1993-09-14 | 1998-10-13 | Mitsubishi, Jukogyo Kabushiki Kaisha | Tire vulcanizing system |
-
1975
- 1975-10-08 JP JP12068175A patent/JPS5244795A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54136377U (en) * | 1978-03-15 | 1979-09-21 | ||
JPS5629140Y2 (en) * | 1978-03-15 | 1981-07-10 | ||
JPS61159576A (en) * | 1984-12-21 | 1986-07-19 | アドバンスト・マイクロ・ディバイシズ・インコーポレーテッド | Formation of silicon nitride film transparent to ultravioletrays |
US5820885A (en) * | 1993-09-14 | 1998-10-13 | Mitsubishi, Jukogyo Kabushiki Kaisha | Tire vulcanizing system |
US5741528A (en) * | 1994-08-25 | 1998-04-21 | Kabushiki Kaisha Kobe Seiko Sho | Tire vulcanizing system |
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