JPS5244795A - Formation of silicon nitride film - Google Patents

Formation of silicon nitride film

Info

Publication number
JPS5244795A
JPS5244795A JP12068175A JP12068175A JPS5244795A JP S5244795 A JPS5244795 A JP S5244795A JP 12068175 A JP12068175 A JP 12068175A JP 12068175 A JP12068175 A JP 12068175A JP S5244795 A JPS5244795 A JP S5244795A
Authority
JP
Japan
Prior art keywords
silicon nitride
nitride film
formation
film
cracking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12068175A
Other languages
Japanese (ja)
Inventor
Takeo Yoshimi
Yukio Sasaki
Katsuo Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12068175A priority Critical patent/JPS5244795A/en
Publication of JPS5244795A publication Critical patent/JPS5244795A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE: To prevent silicon nitride film from cracking when thermal oxidation film is formed using silicon nitride mask by heat treatment on the prescribed surface of semiconductor substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP12068175A 1975-10-08 1975-10-08 Formation of silicon nitride film Pending JPS5244795A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12068175A JPS5244795A (en) 1975-10-08 1975-10-08 Formation of silicon nitride film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12068175A JPS5244795A (en) 1975-10-08 1975-10-08 Formation of silicon nitride film

Publications (1)

Publication Number Publication Date
JPS5244795A true JPS5244795A (en) 1977-04-08

Family

ID=14792302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12068175A Pending JPS5244795A (en) 1975-10-08 1975-10-08 Formation of silicon nitride film

Country Status (1)

Country Link
JP (1) JPS5244795A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54136377U (en) * 1978-03-15 1979-09-21
JPS61159576A (en) * 1984-12-21 1986-07-19 アドバンスト・マイクロ・ディバイシズ・インコーポレーテッド Formation of silicon nitride film transparent to ultravioletrays
US5741528A (en) * 1994-08-25 1998-04-21 Kabushiki Kaisha Kobe Seiko Sho Tire vulcanizing system
US5820885A (en) * 1993-09-14 1998-10-13 Mitsubishi, Jukogyo Kabushiki Kaisha Tire vulcanizing system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54136377U (en) * 1978-03-15 1979-09-21
JPS5629140Y2 (en) * 1978-03-15 1981-07-10
JPS61159576A (en) * 1984-12-21 1986-07-19 アドバンスト・マイクロ・ディバイシズ・インコーポレーテッド Formation of silicon nitride film transparent to ultravioletrays
US5820885A (en) * 1993-09-14 1998-10-13 Mitsubishi, Jukogyo Kabushiki Kaisha Tire vulcanizing system
US5741528A (en) * 1994-08-25 1998-04-21 Kabushiki Kaisha Kobe Seiko Sho Tire vulcanizing system

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