JPS5274281A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5274281A
JPS5274281A JP14962575A JP14962575A JPS5274281A JP S5274281 A JPS5274281 A JP S5274281A JP 14962575 A JP14962575 A JP 14962575A JP 14962575 A JP14962575 A JP 14962575A JP S5274281 A JPS5274281 A JP S5274281A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
film
withstand
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14962575A
Other languages
Japanese (ja)
Inventor
Hiroshi Umezaki
Naoki Yamamoto
Yoshifumi Kawamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14962575A priority Critical patent/JPS5274281A/en
Publication of JPS5274281A publication Critical patent/JPS5274281A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To form required wiring conductive paths which withstand the high temperature treatment during production process without deteriorating characteristics by using dry etching for an SiO2 film and chemical etching for an Al film.
COPYRIGHT: (C)1977,JPO&Japio
JP14962575A 1975-12-17 1975-12-17 Production of semiconductor device Pending JPS5274281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14962575A JPS5274281A (en) 1975-12-17 1975-12-17 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14962575A JPS5274281A (en) 1975-12-17 1975-12-17 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5274281A true JPS5274281A (en) 1977-06-22

Family

ID=15479300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14962575A Pending JPS5274281A (en) 1975-12-17 1975-12-17 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5274281A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574121A (en) * 1980-06-10 1982-01-09 Nec Corp Manufacture of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113477A (en) * 1975-03-28 1976-10-06 Fujitsu Ltd Semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113477A (en) * 1975-03-28 1976-10-06 Fujitsu Ltd Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574121A (en) * 1980-06-10 1982-01-09 Nec Corp Manufacture of semiconductor device

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