JPS5274281A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5274281A JPS5274281A JP14962575A JP14962575A JPS5274281A JP S5274281 A JPS5274281 A JP S5274281A JP 14962575 A JP14962575 A JP 14962575A JP 14962575 A JP14962575 A JP 14962575A JP S5274281 A JPS5274281 A JP S5274281A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- film
- withstand
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To form required wiring conductive paths which withstand the high temperature treatment during production process without deteriorating characteristics by using dry etching for an SiO2 film and chemical etching for an Al film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14962575A JPS5274281A (en) | 1975-12-17 | 1975-12-17 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14962575A JPS5274281A (en) | 1975-12-17 | 1975-12-17 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5274281A true JPS5274281A (en) | 1977-06-22 |
Family
ID=15479300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14962575A Pending JPS5274281A (en) | 1975-12-17 | 1975-12-17 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5274281A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS574121A (en) * | 1980-06-10 | 1982-01-09 | Nec Corp | Manufacture of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51113477A (en) * | 1975-03-28 | 1976-10-06 | Fujitsu Ltd | Semiconductor device |
-
1975
- 1975-12-17 JP JP14962575A patent/JPS5274281A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51113477A (en) * | 1975-03-28 | 1976-10-06 | Fujitsu Ltd | Semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS574121A (en) * | 1980-06-10 | 1982-01-09 | Nec Corp | Manufacture of semiconductor device |
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