JPS5254370A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5254370A
JPS5254370A JP13085375A JP13085375A JPS5254370A JP S5254370 A JPS5254370 A JP S5254370A JP 13085375 A JP13085375 A JP 13085375A JP 13085375 A JP13085375 A JP 13085375A JP S5254370 A JPS5254370 A JP S5254370A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
crazing
layer
isolating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13085375A
Other languages
Japanese (ja)
Inventor
Tatsuyuki Sanada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13085375A priority Critical patent/JPS5254370A/en
Publication of JPS5254370A publication Critical patent/JPS5254370A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a semiconductor device which does not cause crazing in heat treatment even if an insulation layer is thickly formed by forming grooves for prevention of crazing in the portions that do not get into the element regions of a semiconductor substrate or the thin insulator layer formed on its layer thereby isolating them to island form.
COPYRIGHT: (C)1977,JPO&Japio
JP13085375A 1975-10-29 1975-10-29 Production of semiconductor device Pending JPS5254370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13085375A JPS5254370A (en) 1975-10-29 1975-10-29 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13085375A JPS5254370A (en) 1975-10-29 1975-10-29 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5254370A true JPS5254370A (en) 1977-05-02

Family

ID=15044211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13085375A Pending JPS5254370A (en) 1975-10-29 1975-10-29 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5254370A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4975062A (en) * 1972-11-20 1974-07-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4975062A (en) * 1972-11-20 1974-07-19

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