JPS5254370A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5254370A JPS5254370A JP13085375A JP13085375A JPS5254370A JP S5254370 A JPS5254370 A JP S5254370A JP 13085375 A JP13085375 A JP 13085375A JP 13085375 A JP13085375 A JP 13085375A JP S5254370 A JPS5254370 A JP S5254370A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production
- crazing
- layer
- isolating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a semiconductor device which does not cause crazing in heat treatment even if an insulation layer is thickly formed by forming grooves for prevention of crazing in the portions that do not get into the element regions of a semiconductor substrate or the thin insulator layer formed on its layer thereby isolating them to island form.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13085375A JPS5254370A (en) | 1975-10-29 | 1975-10-29 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13085375A JPS5254370A (en) | 1975-10-29 | 1975-10-29 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5254370A true JPS5254370A (en) | 1977-05-02 |
Family
ID=15044211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13085375A Pending JPS5254370A (en) | 1975-10-29 | 1975-10-29 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5254370A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4975062A (en) * | 1972-11-20 | 1974-07-19 |
-
1975
- 1975-10-29 JP JP13085375A patent/JPS5254370A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4975062A (en) * | 1972-11-20 | 1974-07-19 |
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