JPS53105385A - Manufacture for semiconductor - Google Patents

Manufacture for semiconductor

Info

Publication number
JPS53105385A
JPS53105385A JP1989577A JP1989577A JPS53105385A JP S53105385 A JPS53105385 A JP S53105385A JP 1989577 A JP1989577 A JP 1989577A JP 1989577 A JP1989577 A JP 1989577A JP S53105385 A JPS53105385 A JP S53105385A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
phosphorus
reliability
preventing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989577A
Other languages
Japanese (ja)
Other versions
JPS5642133B2 (en
Inventor
Katsuyuki Inayoshi
Masataka Shinguu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1989577A priority Critical patent/JPS53105385A/en
Publication of JPS53105385A publication Critical patent/JPS53105385A/en
Publication of JPS5642133B2 publication Critical patent/JPS5642133B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To increase the yield rate of device manufacturing and the reliability, by forming thin oxide film on the exposed surface of the p type source drain domain and preventing the n+ diffusion layer with phosphorus from PSG film from being formed.
COPYRIGHT: (C)1978,JPO&Japio
JP1989577A 1977-02-25 1977-02-25 Manufacture for semiconductor Granted JPS53105385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989577A JPS53105385A (en) 1977-02-25 1977-02-25 Manufacture for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989577A JPS53105385A (en) 1977-02-25 1977-02-25 Manufacture for semiconductor

Publications (2)

Publication Number Publication Date
JPS53105385A true JPS53105385A (en) 1978-09-13
JPS5642133B2 JPS5642133B2 (en) 1981-10-02

Family

ID=12011924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989577A Granted JPS53105385A (en) 1977-02-25 1977-02-25 Manufacture for semiconductor

Country Status (1)

Country Link
JP (1) JPS53105385A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140130A (en) * 1982-02-16 1983-08-19 Nec Corp Manufacture of semiconductor device
JPS58192321A (en) * 1982-05-06 1983-11-09 Nec Kyushu Ltd Manufacture of semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161521U (en) * 1988-04-30 1989-11-09

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1974 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140130A (en) * 1982-02-16 1983-08-19 Nec Corp Manufacture of semiconductor device
JPS6343886B2 (en) * 1982-02-16 1988-09-01 Nippon Electric Co
JPS58192321A (en) * 1982-05-06 1983-11-09 Nec Kyushu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5642133B2 (en) 1981-10-02

Similar Documents

Publication Publication Date Title
JPS53108390A (en) Semiconductor device and its manufacture
JPS5351970A (en) Manufacture for semiconductor substrate
JPS53142196A (en) Bipolar type semiconductor device
JPS5269589A (en) Semiconductor capacity element
JPS53105385A (en) Manufacture for semiconductor
JPS5331964A (en) Production of semiconductor substrates
JPS53109487A (en) Manufacture for semiconductor device
JPS546793A (en) Photo detector of semiconductor
JPS543473A (en) Manufacture of semiconductor device
JPS52153373A (en) Preparation of semiconductor device
JPS5396666A (en) Manufacture of semiconductor device with pn junction
JPS547867A (en) Manufacture for semiconductor device
JPS5268371A (en) Semiconductor device
JPS5370769A (en) Production of semiconductor device
JPS5384567A (en) Manufacture for semiconductor device
JPS5317286A (en) Production of semiconductor device
JPS53130979A (en) Manufacture for semiconductor device
JPS5326681A (en) Manufact ure of semiconductor device
JPS546785A (en) Manufacture of semiconductor device
JPS52150962A (en) Production of semiconductor device
JPS53101977A (en) Diffusion method of inpurity to semiconductor substrate
JPS5363986A (en) Production of semiconductor device
JPS5377168A (en) Production of semiconductor device
JPS5384554A (en) Manufacture for semiconductor device
JPS52127758A (en) Production of semiconductor unit