JPS53105385A - Manufacture for semiconductor - Google Patents
Manufacture for semiconductorInfo
- Publication number
- JPS53105385A JPS53105385A JP1989577A JP1989577A JPS53105385A JP S53105385 A JPS53105385 A JP S53105385A JP 1989577 A JP1989577 A JP 1989577A JP 1989577 A JP1989577 A JP 1989577A JP S53105385 A JPS53105385 A JP S53105385A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacture
- phosphorus
- reliability
- preventing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To increase the yield rate of device manufacturing and the reliability, by forming thin oxide film on the exposed surface of the p type source drain domain and preventing the n+ diffusion layer with phosphorus from PSG film from being formed.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989577A JPS53105385A (en) | 1977-02-25 | 1977-02-25 | Manufacture for semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989577A JPS53105385A (en) | 1977-02-25 | 1977-02-25 | Manufacture for semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53105385A true JPS53105385A (en) | 1978-09-13 |
JPS5642133B2 JPS5642133B2 (en) | 1981-10-02 |
Family
ID=12011924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989577A Granted JPS53105385A (en) | 1977-02-25 | 1977-02-25 | Manufacture for semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53105385A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58140130A (en) * | 1982-02-16 | 1983-08-19 | Nec Corp | Manufacture of semiconductor device |
JPS58192321A (en) * | 1982-05-06 | 1983-11-09 | Nec Kyushu Ltd | Manufacture of semiconductor device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01161521U (en) * | 1988-04-30 | 1989-11-09 |
-
1977
- 1977-02-25 JP JP1989577A patent/JPS53105385A/en active Granted
Non-Patent Citations (1)
Title |
---|
JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1974 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58140130A (en) * | 1982-02-16 | 1983-08-19 | Nec Corp | Manufacture of semiconductor device |
JPS6343886B2 (en) * | 1982-02-16 | 1988-09-01 | Nippon Electric Co | |
JPS58192321A (en) * | 1982-05-06 | 1983-11-09 | Nec Kyushu Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5642133B2 (en) | 1981-10-02 |
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