JPS53109487A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53109487A
JPS53109487A JP2527577A JP2527577A JPS53109487A JP S53109487 A JPS53109487 A JP S53109487A JP 2527577 A JP2527577 A JP 2527577A JP 2527577 A JP2527577 A JP 2527577A JP S53109487 A JPS53109487 A JP S53109487A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
diffusing
wiring
thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2527577A
Other languages
Japanese (ja)
Other versions
JPS5755301B2 (en
Inventor
Takashi Osone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2527577A priority Critical patent/JPS53109487A/en
Publication of JPS53109487A publication Critical patent/JPS53109487A/en
Publication of JPS5755301B2 publication Critical patent/JPS5755301B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To manufacture the device having the gate electrode window of about 2 μm thick and wiring, by diffusing the high concentration impurity domain formed on the semiconductor substrate or insulating film to the high specific resistance poly silicon placed on it.
COPYRIGHT: (C)1978,JPO&Japio
JP2527577A 1977-03-07 1977-03-07 Manufacture for semiconductor device Granted JPS53109487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2527577A JPS53109487A (en) 1977-03-07 1977-03-07 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2527577A JPS53109487A (en) 1977-03-07 1977-03-07 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS53109487A true JPS53109487A (en) 1978-09-25
JPS5755301B2 JPS5755301B2 (en) 1982-11-24

Family

ID=12161462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2527577A Granted JPS53109487A (en) 1977-03-07 1977-03-07 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53109487A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108772A (en) * 1979-02-14 1980-08-21 Nec Corp Semiconductor integrated circuit device
JPS55111155A (en) * 1979-02-20 1980-08-27 Toshiba Corp Semiconductor device and manufacturing method thereof
JPS5678150A (en) * 1979-11-30 1981-06-26 Toshiba Corp Semiconductor and manufacture thereof
JPS5696850A (en) * 1979-12-30 1981-08-05 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS6313364A (en) * 1986-07-03 1988-01-20 Rohm Co Ltd Manufacture of semiconductor device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915913A (en) * 1972-06-09 1974-02-12
JPS50141982A (en) * 1974-05-02 1975-11-15
JPS5372483A (en) * 1976-12-09 1978-06-27 Matsushita Electric Ind Co Ltd Semiconductor device and its manufacture

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915913A (en) * 1972-06-09 1974-02-12
JPS50141982A (en) * 1974-05-02 1975-11-15
JPS5372483A (en) * 1976-12-09 1978-06-27 Matsushita Electric Ind Co Ltd Semiconductor device and its manufacture

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108772A (en) * 1979-02-14 1980-08-21 Nec Corp Semiconductor integrated circuit device
JPS55111155A (en) * 1979-02-20 1980-08-27 Toshiba Corp Semiconductor device and manufacturing method thereof
JPS5678150A (en) * 1979-11-30 1981-06-26 Toshiba Corp Semiconductor and manufacture thereof
JPS5826178B2 (en) * 1979-11-30 1983-06-01 株式会社東芝 semiconductor equipment
JPS5696850A (en) * 1979-12-30 1981-08-05 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS6243547B2 (en) * 1979-12-30 1987-09-14 Fujitsu Ltd
JPS6313364A (en) * 1986-07-03 1988-01-20 Rohm Co Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5755301B2 (en) 1982-11-24

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