JPS53109487A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53109487A JPS53109487A JP2527577A JP2527577A JPS53109487A JP S53109487 A JPS53109487 A JP S53109487A JP 2527577 A JP2527577 A JP 2527577A JP 2527577 A JP2527577 A JP 2527577A JP S53109487 A JPS53109487 A JP S53109487A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- diffusing
- wiring
- thick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To manufacture the device having the gate electrode window of about 2 μm thick and wiring, by diffusing the high concentration impurity domain formed on the semiconductor substrate or insulating film to the high specific resistance poly silicon placed on it.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2527577A JPS53109487A (en) | 1977-03-07 | 1977-03-07 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2527577A JPS53109487A (en) | 1977-03-07 | 1977-03-07 | Manufacture for semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53109487A true JPS53109487A (en) | 1978-09-25 |
JPS5755301B2 JPS5755301B2 (en) | 1982-11-24 |
Family
ID=12161462
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2527577A Granted JPS53109487A (en) | 1977-03-07 | 1977-03-07 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53109487A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55108772A (en) * | 1979-02-14 | 1980-08-21 | Nec Corp | Semiconductor integrated circuit device |
JPS55111155A (en) * | 1979-02-20 | 1980-08-27 | Toshiba Corp | Semiconductor device and manufacturing method thereof |
JPS5678150A (en) * | 1979-11-30 | 1981-06-26 | Toshiba Corp | Semiconductor and manufacture thereof |
JPS5696850A (en) * | 1979-12-30 | 1981-08-05 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
JPS6313364A (en) * | 1986-07-03 | 1988-01-20 | Rohm Co Ltd | Manufacture of semiconductor device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4915913A (en) * | 1972-06-09 | 1974-02-12 | ||
JPS50141982A (en) * | 1974-05-02 | 1975-11-15 | ||
JPS5372483A (en) * | 1976-12-09 | 1978-06-27 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacture |
-
1977
- 1977-03-07 JP JP2527577A patent/JPS53109487A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4915913A (en) * | 1972-06-09 | 1974-02-12 | ||
JPS50141982A (en) * | 1974-05-02 | 1975-11-15 | ||
JPS5372483A (en) * | 1976-12-09 | 1978-06-27 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacture |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55108772A (en) * | 1979-02-14 | 1980-08-21 | Nec Corp | Semiconductor integrated circuit device |
JPS55111155A (en) * | 1979-02-20 | 1980-08-27 | Toshiba Corp | Semiconductor device and manufacturing method thereof |
JPS5678150A (en) * | 1979-11-30 | 1981-06-26 | Toshiba Corp | Semiconductor and manufacture thereof |
JPS5826178B2 (en) * | 1979-11-30 | 1983-06-01 | 株式会社東芝 | semiconductor equipment |
JPS5696850A (en) * | 1979-12-30 | 1981-08-05 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
JPS6243547B2 (en) * | 1979-12-30 | 1987-09-14 | Fujitsu Ltd | |
JPS6313364A (en) * | 1986-07-03 | 1988-01-20 | Rohm Co Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5755301B2 (en) | 1982-11-24 |
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