JPS53121478A - Semiconductor device and its manufacture - Google Patents
Semiconductor device and its manufactureInfo
- Publication number
- JPS53121478A JPS53121478A JP3545677A JP3545677A JPS53121478A JP S53121478 A JPS53121478 A JP S53121478A JP 3545677 A JP3545677 A JP 3545677A JP 3545677 A JP3545677 A JP 3545677A JP S53121478 A JPS53121478 A JP S53121478A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- oxide film
- gate electrode
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To sufficiently prevent the short circuit between the source and the drain, by forming the gate electrode with crossing over the gate oxide film and the thick oxide film placed in contact with it, and by providing the contact hole to the gate electrode in the active domain.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3545677A JPS53121478A (en) | 1977-03-31 | 1977-03-31 | Semiconductor device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3545677A JPS53121478A (en) | 1977-03-31 | 1977-03-31 | Semiconductor device and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53121478A true JPS53121478A (en) | 1978-10-23 |
Family
ID=12442289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3545677A Pending JPS53121478A (en) | 1977-03-31 | 1977-03-31 | Semiconductor device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53121478A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5685865A (en) * | 1979-09-18 | 1981-07-13 | Sony Corp | Semiconductor device |
-
1977
- 1977-03-31 JP JP3545677A patent/JPS53121478A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5685865A (en) * | 1979-09-18 | 1981-07-13 | Sony Corp | Semiconductor device |
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