JPS53121478A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS53121478A
JPS53121478A JP3545677A JP3545677A JPS53121478A JP S53121478 A JPS53121478 A JP S53121478A JP 3545677 A JP3545677 A JP 3545677A JP 3545677 A JP3545677 A JP 3545677A JP S53121478 A JPS53121478 A JP S53121478A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
oxide film
gate electrode
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3545677A
Other languages
Japanese (ja)
Inventor
Hiroyuki Nihei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3545677A priority Critical patent/JPS53121478A/en
Publication of JPS53121478A publication Critical patent/JPS53121478A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To sufficiently prevent the short circuit between the source and the drain, by forming the gate electrode with crossing over the gate oxide film and the thick oxide film placed in contact with it, and by providing the contact hole to the gate electrode in the active domain.
COPYRIGHT: (C)1978,JPO&Japio
JP3545677A 1977-03-31 1977-03-31 Semiconductor device and its manufacture Pending JPS53121478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3545677A JPS53121478A (en) 1977-03-31 1977-03-31 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3545677A JPS53121478A (en) 1977-03-31 1977-03-31 Semiconductor device and its manufacture

Publications (1)

Publication Number Publication Date
JPS53121478A true JPS53121478A (en) 1978-10-23

Family

ID=12442289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3545677A Pending JPS53121478A (en) 1977-03-31 1977-03-31 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS53121478A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5685865A (en) * 1979-09-18 1981-07-13 Sony Corp Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5685865A (en) * 1979-09-18 1981-07-13 Sony Corp Semiconductor device

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