JPS5317284A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5317284A JPS5317284A JP9261576A JP9261576A JPS5317284A JP S5317284 A JPS5317284 A JP S5317284A JP 9261576 A JP9261576 A JP 9261576A JP 9261576 A JP9261576 A JP 9261576A JP S5317284 A JPS5317284 A JP S5317284A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- portions
- source
- mosfets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To obtain MOSFETs of high breakdown voltage by providing thick and thin portions in the poly-Si film of source, drain regions and forming deep portions and shallow portions to source, drain diffused layers by using these.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9261576A JPS5951152B2 (en) | 1976-07-31 | 1976-07-31 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9261576A JPS5951152B2 (en) | 1976-07-31 | 1976-07-31 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5317284A true JPS5317284A (en) | 1978-02-17 |
JPS5951152B2 JPS5951152B2 (en) | 1984-12-12 |
Family
ID=14059332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9261576A Expired JPS5951152B2 (en) | 1976-07-31 | 1976-07-31 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5951152B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS572519A (en) * | 1980-06-05 | 1982-01-07 | Nec Corp | Manufacture of semiconductor device |
JPS5732674A (en) * | 1980-07-08 | 1982-02-22 | Ibm | Integrated circuit structure |
-
1976
- 1976-07-31 JP JP9261576A patent/JPS5951152B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS572519A (en) * | 1980-06-05 | 1982-01-07 | Nec Corp | Manufacture of semiconductor device |
JPS5732674A (en) * | 1980-07-08 | 1982-02-22 | Ibm | Integrated circuit structure |
JPH033389B2 (en) * | 1980-07-08 | 1991-01-18 | Intaanashonaru Bijinesu Mashiinzu Corp |
Also Published As
Publication number | Publication date |
---|---|
JPS5951152B2 (en) | 1984-12-12 |
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