JPS52146575A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52146575A
JPS52146575A JP6324076A JP6324076A JPS52146575A JP S52146575 A JPS52146575 A JP S52146575A JP 6324076 A JP6324076 A JP 6324076A JP 6324076 A JP6324076 A JP 6324076A JP S52146575 A JPS52146575 A JP S52146575A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
channel
phenomena
punch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6324076A
Other languages
Japanese (ja)
Other versions
JPS5514538B2 (en
Inventor
Kazuo Sato
Mitsuhiko Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6324076A priority Critical patent/JPS52146575A/en
Publication of JPS52146575A publication Critical patent/JPS52146575A/en
Publication of JPS5514538B2 publication Critical patent/JPS5514538B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To improve electric characteristics and prevent the punch-through phenomena of Al by forming the diffused layer of P channel MOSFETs after N channel FETs.
COPYRIGHT: (C)1977,JPO&Japio
JP6324076A 1976-05-31 1976-05-31 Production of semiconductor device Granted JPS52146575A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6324076A JPS52146575A (en) 1976-05-31 1976-05-31 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6324076A JPS52146575A (en) 1976-05-31 1976-05-31 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52146575A true JPS52146575A (en) 1977-12-06
JPS5514538B2 JPS5514538B2 (en) 1980-04-17

Family

ID=13223491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6324076A Granted JPS52146575A (en) 1976-05-31 1976-05-31 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52146575A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0434411Y2 (en) * 1985-06-26 1992-08-17

Also Published As

Publication number Publication date
JPS5514538B2 (en) 1980-04-17

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