JPS52141578A - Manufacture of mos-type semiconductor device - Google Patents

Manufacture of mos-type semiconductor device

Info

Publication number
JPS52141578A
JPS52141578A JP5860876A JP5860876A JPS52141578A JP S52141578 A JPS52141578 A JP S52141578A JP 5860876 A JP5860876 A JP 5860876A JP 5860876 A JP5860876 A JP 5860876A JP S52141578 A JPS52141578 A JP S52141578A
Authority
JP
Japan
Prior art keywords
mos
semiconductor device
type semiconductor
manufacture
sos
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5860876A
Other languages
Japanese (ja)
Inventor
Takeshi Ishihara
Takeya Ezaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5860876A priority Critical patent/JPS52141578A/en
Publication of JPS52141578A publication Critical patent/JPS52141578A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To obtain the MOS-type semiconductor device having an excellent high frequency characteristic by forming the short channel in SOS constitution.
COPYRIGHT: (C)1977,JPO&Japio
JP5860876A 1976-05-20 1976-05-20 Manufacture of mos-type semiconductor device Pending JPS52141578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5860876A JPS52141578A (en) 1976-05-20 1976-05-20 Manufacture of mos-type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5860876A JPS52141578A (en) 1976-05-20 1976-05-20 Manufacture of mos-type semiconductor device

Publications (1)

Publication Number Publication Date
JPS52141578A true JPS52141578A (en) 1977-11-25

Family

ID=13089231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5860876A Pending JPS52141578A (en) 1976-05-20 1976-05-20 Manufacture of mos-type semiconductor device

Country Status (1)

Country Link
JP (1) JPS52141578A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54144881A (en) * 1978-05-04 1979-11-12 Cho Lsi Gijutsu Kenkyu Kumiai Method of fabricating semiconductor device
JPS5552264A (en) * 1978-10-11 1980-04-16 Seiko Epson Corp Manufacturing of semiconductor device
JPS5732674A (en) * 1980-07-08 1982-02-22 Ibm Integrated circuit structure

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54144881A (en) * 1978-05-04 1979-11-12 Cho Lsi Gijutsu Kenkyu Kumiai Method of fabricating semiconductor device
JPS6252471B2 (en) * 1978-05-04 1987-11-05 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai
JPS5552264A (en) * 1978-10-11 1980-04-16 Seiko Epson Corp Manufacturing of semiconductor device
JPS5732674A (en) * 1980-07-08 1982-02-22 Ibm Integrated circuit structure
JPH033389B2 (en) * 1980-07-08 1991-01-18 Intaanashonaru Bijinesu Mashiinzu Corp

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