JPS52141578A - Manufacture of mos-type semiconductor device - Google Patents
Manufacture of mos-type semiconductor deviceInfo
- Publication number
- JPS52141578A JPS52141578A JP5860876A JP5860876A JPS52141578A JP S52141578 A JPS52141578 A JP S52141578A JP 5860876 A JP5860876 A JP 5860876A JP 5860876 A JP5860876 A JP 5860876A JP S52141578 A JPS52141578 A JP S52141578A
- Authority
- JP
- Japan
- Prior art keywords
- mos
- semiconductor device
- type semiconductor
- manufacture
- sos
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Weting (AREA)
Abstract
PURPOSE: To obtain the MOS-type semiconductor device having an excellent high frequency characteristic by forming the short channel in SOS constitution.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5860876A JPS52141578A (en) | 1976-05-20 | 1976-05-20 | Manufacture of mos-type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5860876A JPS52141578A (en) | 1976-05-20 | 1976-05-20 | Manufacture of mos-type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52141578A true JPS52141578A (en) | 1977-11-25 |
Family
ID=13089231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5860876A Pending JPS52141578A (en) | 1976-05-20 | 1976-05-20 | Manufacture of mos-type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52141578A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54144881A (en) * | 1978-05-04 | 1979-11-12 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of fabricating semiconductor device |
JPS5552264A (en) * | 1978-10-11 | 1980-04-16 | Seiko Epson Corp | Manufacturing of semiconductor device |
JPS5732674A (en) * | 1980-07-08 | 1982-02-22 | Ibm | Integrated circuit structure |
-
1976
- 1976-05-20 JP JP5860876A patent/JPS52141578A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54144881A (en) * | 1978-05-04 | 1979-11-12 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of fabricating semiconductor device |
JPS6252471B2 (en) * | 1978-05-04 | 1987-11-05 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai | |
JPS5552264A (en) * | 1978-10-11 | 1980-04-16 | Seiko Epson Corp | Manufacturing of semiconductor device |
JPS5732674A (en) * | 1980-07-08 | 1982-02-22 | Ibm | Integrated circuit structure |
JPH033389B2 (en) * | 1980-07-08 | 1991-01-18 | Intaanashonaru Bijinesu Mashiinzu Corp |
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