JPS54144881A - Method of fabricating semiconductor device - Google Patents

Method of fabricating semiconductor device

Info

Publication number
JPS54144881A
JPS54144881A JP5279378A JP5279378A JPS54144881A JP S54144881 A JPS54144881 A JP S54144881A JP 5279378 A JP5279378 A JP 5279378A JP 5279378 A JP5279378 A JP 5279378A JP S54144881 A JPS54144881 A JP S54144881A
Authority
JP
Japan
Prior art keywords
semiconductor device
fabricating semiconductor
fabricating
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5279378A
Other languages
Japanese (ja)
Other versions
JPS6252471B2 (en
Inventor
Kazumasa Onodera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP5279378A priority Critical patent/JPS54144881A/en
Publication of JPS54144881A publication Critical patent/JPS54144881A/en
Publication of JPS6252471B2 publication Critical patent/JPS6252471B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Electron Beam Exposure (AREA)
JP5279378A 1978-05-04 1978-05-04 Method of fabricating semiconductor device Granted JPS54144881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5279378A JPS54144881A (en) 1978-05-04 1978-05-04 Method of fabricating semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5279378A JPS54144881A (en) 1978-05-04 1978-05-04 Method of fabricating semiconductor device

Publications (2)

Publication Number Publication Date
JPS54144881A true JPS54144881A (en) 1979-11-12
JPS6252471B2 JPS6252471B2 (en) 1987-11-05

Family

ID=12924706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5279378A Granted JPS54144881A (en) 1978-05-04 1978-05-04 Method of fabricating semiconductor device

Country Status (1)

Country Link
JP (1) JPS54144881A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52141578A (en) * 1976-05-20 1977-11-25 Matsushita Electric Ind Co Ltd Manufacture of mos-type semiconductor device
JPS534477A (en) * 1976-07-02 1978-01-17 Fujitsu Ltd Production of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52141578A (en) * 1976-05-20 1977-11-25 Matsushita Electric Ind Co Ltd Manufacture of mos-type semiconductor device
JPS534477A (en) * 1976-07-02 1978-01-17 Fujitsu Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPS6252471B2 (en) 1987-11-05

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