JPS54144881A - Method of fabricating semiconductor device - Google Patents
Method of fabricating semiconductor deviceInfo
- Publication number
- JPS54144881A JPS54144881A JP5279378A JP5279378A JPS54144881A JP S54144881 A JPS54144881 A JP S54144881A JP 5279378 A JP5279378 A JP 5279378A JP 5279378 A JP5279378 A JP 5279378A JP S54144881 A JPS54144881 A JP S54144881A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- fabricating semiconductor
- fabricating
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5279378A JPS54144881A (en) | 1978-05-04 | 1978-05-04 | Method of fabricating semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5279378A JPS54144881A (en) | 1978-05-04 | 1978-05-04 | Method of fabricating semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54144881A true JPS54144881A (en) | 1979-11-12 |
JPS6252471B2 JPS6252471B2 (en) | 1987-11-05 |
Family
ID=12924706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5279378A Granted JPS54144881A (en) | 1978-05-04 | 1978-05-04 | Method of fabricating semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54144881A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52141578A (en) * | 1976-05-20 | 1977-11-25 | Matsushita Electric Ind Co Ltd | Manufacture of mos-type semiconductor device |
JPS534477A (en) * | 1976-07-02 | 1978-01-17 | Fujitsu Ltd | Production of semiconductor device |
-
1978
- 1978-05-04 JP JP5279378A patent/JPS54144881A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52141578A (en) * | 1976-05-20 | 1977-11-25 | Matsushita Electric Ind Co Ltd | Manufacture of mos-type semiconductor device |
JPS534477A (en) * | 1976-07-02 | 1978-01-17 | Fujitsu Ltd | Production of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6252471B2 (en) | 1987-11-05 |
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