JPS5410682A - Production of semiconductor elements - Google Patents

Production of semiconductor elements

Info

Publication number
JPS5410682A
JPS5410682A JP7573877A JP7573877A JPS5410682A JP S5410682 A JPS5410682 A JP S5410682A JP 7573877 A JP7573877 A JP 7573877A JP 7573877 A JP7573877 A JP 7573877A JP S5410682 A JPS5410682 A JP S5410682A
Authority
JP
Japan
Prior art keywords
semiconductor
production
structural construction
accurate sizes
sizes relatively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7573877A
Other languages
Japanese (ja)
Inventor
Yoichi Kuriyama
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corp filed Critical Nec Corp
Priority to JP7573877A priority Critical patent/JPS5410682A/en
Publication of JPS5410682A publication Critical patent/JPS5410682A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain semiconductor elements having mesa structural construction possessing accurate sizes relatively easily.
COPYRIGHT: (C)1979,JPO&Japio
JP7573877A 1977-06-25 1977-06-25 Production of semiconductor elements Pending JPS5410682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7573877A JPS5410682A (en) 1977-06-25 1977-06-25 Production of semiconductor elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7573877A JPS5410682A (en) 1977-06-25 1977-06-25 Production of semiconductor elements

Publications (1)

Publication Number Publication Date
JPS5410682A true JPS5410682A (en) 1979-01-26

Family

ID=13584911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7573877A Pending JPS5410682A (en) 1977-06-25 1977-06-25 Production of semiconductor elements

Country Status (1)

Country Link
JP (1) JPS5410682A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS578227U (en) * 1980-06-17 1982-01-16
JPS58119798A (en) * 1981-12-10 1983-07-16 Gen Electric Canada Electric inching controller
JPS58182241A (en) * 1982-04-19 1983-10-25 Clarion Co Ltd Cutting method for single crystal wafer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS578227U (en) * 1980-06-17 1982-01-16
JPS58119798A (en) * 1981-12-10 1983-07-16 Gen Electric Canada Electric inching controller
JPH0341030B2 (en) * 1981-12-10 1991-06-20
JPS58182241A (en) * 1982-04-19 1983-10-25 Clarion Co Ltd Cutting method for single crystal wafer

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