JPS5370666A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5370666A JPS5370666A JP14673876A JP14673876A JPS5370666A JP S5370666 A JPS5370666 A JP S5370666A JP 14673876 A JP14673876 A JP 14673876A JP 14673876 A JP14673876 A JP 14673876A JP S5370666 A JPS5370666 A JP S5370666A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- mosfets
- device suitable
- channel doping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To realize the process for production of a semiconductor device suitable for the production of concentration inversion type MOSFETs with channel doping and MOSFETs.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14673876A JPS5370666A (en) | 1976-12-06 | 1976-12-06 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14673876A JPS5370666A (en) | 1976-12-06 | 1976-12-06 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5370666A true JPS5370666A (en) | 1978-06-23 |
Family
ID=15414467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14673876A Pending JPS5370666A (en) | 1976-12-06 | 1976-12-06 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5370666A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6168907B1 (en) | 1997-11-06 | 2001-01-02 | Hyundai Electronics Industries Co., Ltd. | Method for etching semiconductor device |
-
1976
- 1976-12-06 JP JP14673876A patent/JPS5370666A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6168907B1 (en) | 1997-11-06 | 2001-01-02 | Hyundai Electronics Industries Co., Ltd. | Method for etching semiconductor device |
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