JPS5272580A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5272580A JPS5272580A JP14851075A JP14851075A JPS5272580A JP S5272580 A JPS5272580 A JP S5272580A JP 14851075 A JP14851075 A JP 14851075A JP 14851075 A JP14851075 A JP 14851075A JP S5272580 A JPS5272580 A JP S5272580A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production
- implanted
- impurities
- drain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a semiconductor device wherein no impurities are implanted into drain and source region forming parts at the time of channel doping.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14851075A JPS5272580A (en) | 1975-12-15 | 1975-12-15 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14851075A JPS5272580A (en) | 1975-12-15 | 1975-12-15 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5272580A true JPS5272580A (en) | 1977-06-17 |
Family
ID=15454366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14851075A Pending JPS5272580A (en) | 1975-12-15 | 1975-12-15 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5272580A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52107777A (en) * | 1976-03-08 | 1977-09-09 | Nippon Telegr & Teleph Corp <Ntt> | Production of semiconductor unit |
JPS5615078A (en) * | 1979-07-17 | 1981-02-13 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5856464A (en) * | 1981-09-30 | 1983-04-04 | Toshiba Corp | Manufacture of mos semiconductor device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5086281A (en) * | 1973-11-30 | 1975-07-11 | ||
JPS50141277A (en) * | 1974-04-23 | 1975-11-13 |
-
1975
- 1975-12-15 JP JP14851075A patent/JPS5272580A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5086281A (en) * | 1973-11-30 | 1975-07-11 | ||
JPS50141277A (en) * | 1974-04-23 | 1975-11-13 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52107777A (en) * | 1976-03-08 | 1977-09-09 | Nippon Telegr & Teleph Corp <Ntt> | Production of semiconductor unit |
JPS579506B2 (en) * | 1976-03-08 | 1982-02-22 | ||
JPS5615078A (en) * | 1979-07-17 | 1981-02-13 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5856464A (en) * | 1981-09-30 | 1983-04-04 | Toshiba Corp | Manufacture of mos semiconductor device |
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