JPS5272580A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5272580A
JPS5272580A JP14851075A JP14851075A JPS5272580A JP S5272580 A JPS5272580 A JP S5272580A JP 14851075 A JP14851075 A JP 14851075A JP 14851075 A JP14851075 A JP 14851075A JP S5272580 A JPS5272580 A JP S5272580A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
implanted
impurities
drain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14851075A
Other languages
Japanese (ja)
Inventor
Takashi Matsumoto
Motoo Nakano
Kunihiko Wada
Hitoshi Hasegawa
Shigeru Yamaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14851075A priority Critical patent/JPS5272580A/en
Publication of JPS5272580A publication Critical patent/JPS5272580A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a semiconductor device wherein no impurities are implanted into drain and source region forming parts at the time of channel doping.
COPYRIGHT: (C)1977,JPO&Japio
JP14851075A 1975-12-15 1975-12-15 Production of semiconductor device Pending JPS5272580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14851075A JPS5272580A (en) 1975-12-15 1975-12-15 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14851075A JPS5272580A (en) 1975-12-15 1975-12-15 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5272580A true JPS5272580A (en) 1977-06-17

Family

ID=15454366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14851075A Pending JPS5272580A (en) 1975-12-15 1975-12-15 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5272580A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52107777A (en) * 1976-03-08 1977-09-09 Nippon Telegr & Teleph Corp <Ntt> Production of semiconductor unit
JPS5615078A (en) * 1979-07-17 1981-02-13 Fujitsu Ltd Manufacture of semiconductor device
JPS5856464A (en) * 1981-09-30 1983-04-04 Toshiba Corp Manufacture of mos semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5086281A (en) * 1973-11-30 1975-07-11
JPS50141277A (en) * 1974-04-23 1975-11-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5086281A (en) * 1973-11-30 1975-07-11
JPS50141277A (en) * 1974-04-23 1975-11-13

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52107777A (en) * 1976-03-08 1977-09-09 Nippon Telegr & Teleph Corp <Ntt> Production of semiconductor unit
JPS579506B2 (en) * 1976-03-08 1982-02-22
JPS5615078A (en) * 1979-07-17 1981-02-13 Fujitsu Ltd Manufacture of semiconductor device
JPS5856464A (en) * 1981-09-30 1983-04-04 Toshiba Corp Manufacture of mos semiconductor device

Similar Documents

Publication Publication Date Title
JPS52140280A (en) Semiconductor device
JPS53124087A (en) Manufacture of semiconductor device
JPS5272580A (en) Production of semiconductor device
JPS5272585A (en) Production of semiconductor device
JPS525273A (en) Transistor
JPS525700A (en) The process for production of silicon nitride
JPS53100779A (en) Production of insulated gate type semiconductor device
JPS5245275A (en) Mis type semiconductor device
JPS5410682A (en) Production of semiconductor elements
JPS5390770A (en) Production of semiconductor device
JPS51138166A (en) Production method of semiconductor device
JPS5344181A (en) Production of semiconductor device
JPS5370666A (en) Production of semiconductor device
JPS53139985A (en) Production of mis type transistors
JPS51112292A (en) Semiconductor device
JPS52146186A (en) Semiconductor device
JPS5278384A (en) Production of semiconductor integrated circuit device
JPS51123570A (en) Vertical junction type field dffect transistor production system
JPS5255876A (en) Production of semiconductor device
JPS5432273A (en) Junction type field effect transistor
JPS5253675A (en) Production of semiconductor device
JPS5441082A (en) Semiconductor device and production of the same
JPS5261956A (en) Production of semiconductor device
JPS5279785A (en) Production of semiconductor device
JPS526090A (en) Semiconductor integrated circuit