JPS5278384A - Production of semiconductor integrated circuit device - Google Patents

Production of semiconductor integrated circuit device

Info

Publication number
JPS5278384A
JPS5278384A JP15528775A JP15528775A JPS5278384A JP S5278384 A JPS5278384 A JP S5278384A JP 15528775 A JP15528775 A JP 15528775A JP 15528775 A JP15528775 A JP 15528775A JP S5278384 A JPS5278384 A JP S5278384A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
parasitic
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15528775A
Other languages
Japanese (ja)
Inventor
Satoru Shoji
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corp filed Critical Nec Corp
Priority to JP15528775A priority Critical patent/JPS5278384A/en
Publication of JPS5278384A publication Critical patent/JPS5278384A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To considerably simplify the process of forming a parasitic field effect element shielding region and obtain a process for production of a semiconductor integrated circuit device of a reduced time.
COPYRIGHT: (C)1977,JPO&Japio
JP15528775A 1975-12-25 1975-12-25 Production of semiconductor integrated circuit device Pending JPS5278384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15528775A JPS5278384A (en) 1975-12-25 1975-12-25 Production of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15528775A JPS5278384A (en) 1975-12-25 1975-12-25 Production of semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5278384A true JPS5278384A (en) 1977-07-01

Family

ID=15602590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15528775A Pending JPS5278384A (en) 1975-12-25 1975-12-25 Production of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5278384A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107557A (en) * 1980-01-29 1981-08-26 Nec Home Electronics Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107557A (en) * 1980-01-29 1981-08-26 Nec Home Electronics Ltd Manufacture of semiconductor device

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