JPS5278384A - Production of semiconductor integrated circuit device - Google Patents
Production of semiconductor integrated circuit deviceInfo
- Publication number
- JPS5278384A JPS5278384A JP15528775A JP15528775A JPS5278384A JP S5278384 A JPS5278384 A JP S5278384A JP 15528775 A JP15528775 A JP 15528775A JP 15528775 A JP15528775 A JP 15528775A JP S5278384 A JPS5278384 A JP S5278384A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- circuit device
- field effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To considerably simplify the process of forming a parasitic field effect element shielding region and obtain a process for production of a semiconductor integrated circuit device of a reduced time.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15528775A JPS5278384A (en) | 1975-12-25 | 1975-12-25 | Production of semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15528775A JPS5278384A (en) | 1975-12-25 | 1975-12-25 | Production of semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5278384A true JPS5278384A (en) | 1977-07-01 |
Family
ID=15602590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15528775A Pending JPS5278384A (en) | 1975-12-25 | 1975-12-25 | Production of semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5278384A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56107557A (en) * | 1980-01-29 | 1981-08-26 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
-
1975
- 1975-12-25 JP JP15528775A patent/JPS5278384A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56107557A (en) * | 1980-01-29 | 1981-08-26 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
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