JPS5245884A - Process for production of semiconductor device - Google Patents
Process for production of semiconductor deviceInfo
- Publication number
- JPS5245884A JPS5245884A JP12072875A JP12072875A JPS5245884A JP S5245884 A JPS5245884 A JP S5245884A JP 12072875 A JP12072875 A JP 12072875A JP 12072875 A JP12072875 A JP 12072875A JP S5245884 A JPS5245884 A JP S5245884A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- diffusion
- film
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To form beforehand a region for forming emitter by using an antioxidizing film and remove this film at the time of emitter diffusion, then make the the diffusion, thereby improving the scale of integration, the characteristics of element and the performance and yield of circuits.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12072875A JPS5245884A (en) | 1975-10-08 | 1975-10-08 | Process for production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12072875A JPS5245884A (en) | 1975-10-08 | 1975-10-08 | Process for production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5245884A true JPS5245884A (en) | 1977-04-11 |
Family
ID=14793515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12072875A Pending JPS5245884A (en) | 1975-10-08 | 1975-10-08 | Process for production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5245884A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53129985A (en) * | 1977-04-20 | 1978-11-13 | Hitachi Ltd | Production of semiconductor device |
-
1975
- 1975-10-08 JP JP12072875A patent/JPS5245884A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53129985A (en) * | 1977-04-20 | 1978-11-13 | Hitachi Ltd | Production of semiconductor device |
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