JPS5245884A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5245884A
JPS5245884A JP12072875A JP12072875A JPS5245884A JP S5245884 A JPS5245884 A JP S5245884A JP 12072875 A JP12072875 A JP 12072875A JP 12072875 A JP12072875 A JP 12072875A JP S5245884 A JPS5245884 A JP S5245884A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
diffusion
film
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12072875A
Other languages
Japanese (ja)
Inventor
Takahide Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12072875A priority Critical patent/JPS5245884A/en
Publication of JPS5245884A publication Critical patent/JPS5245884A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To form beforehand a region for forming emitter by using an antioxidizing film and remove this film at the time of emitter diffusion, then make the the diffusion, thereby improving the scale of integration, the characteristics of element and the performance and yield of circuits.
COPYRIGHT: (C)1977,JPO&Japio
JP12072875A 1975-10-08 1975-10-08 Process for production of semiconductor device Pending JPS5245884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12072875A JPS5245884A (en) 1975-10-08 1975-10-08 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12072875A JPS5245884A (en) 1975-10-08 1975-10-08 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5245884A true JPS5245884A (en) 1977-04-11

Family

ID=14793515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12072875A Pending JPS5245884A (en) 1975-10-08 1975-10-08 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5245884A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53129985A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Production of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53129985A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Production of semiconductor device

Similar Documents

Publication Publication Date Title
JPS5224478A (en) Semiconductor device manufacturing process
JPS5247686A (en) Semiconductor device and process for production of same
JPS5235980A (en) Manufacturing method of semiconductor device
JPS5245884A (en) Process for production of semiconductor device
JPS5383467A (en) Production of semiconductor device
JPS5279654A (en) Production of semiconductor device
JPS5249781A (en) Process for production of semiconductor device
JPS5247675A (en) Process for production of semiconductor device
JPS5267271A (en) Formation of through-hole onto semiconductor substrate
JPS53123083A (en) Production of semiconductor device
JPS5248469A (en) Process for production of semiconductor device
JPS51112266A (en) Semiconductor device production method
JPS5278384A (en) Production of semiconductor integrated circuit device
JPS51147190A (en) Method of manufacturing of integurated circuit for lsi
JPS52179A (en) Method of fabricating semiconductor
JPS5247685A (en) Process for production of mos type semiconductor device
JPS5240078A (en) Process for production of semiconductor device
JPS538082A (en) Production of semiconductor device
JPS51118369A (en) Manufacturing process for simiconduator unit
JPS5247378A (en) Process for production of semiconductor device
JPS53100782A (en) Production of semiconductor device
JPS51122375A (en) Semiconductor device
JPS5242375A (en) Process for production of semiconductor device
JPS5235583A (en) Manufacturing process of semiconductor device
JPS5255380A (en) Production of semiconductor device