JPS5247675A - Process for production of semiconductor device - Google Patents
Process for production of semiconductor deviceInfo
- Publication number
- JPS5247675A JPS5247675A JP12410075A JP12410075A JPS5247675A JP S5247675 A JPS5247675 A JP S5247675A JP 12410075 A JP12410075 A JP 12410075A JP 12410075 A JP12410075 A JP 12410075A JP S5247675 A JPS5247675 A JP S5247675A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- compound semiconductor
- semicoinductor
- anneal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To anneal a compound semiconductor by way of an insulating film containing compound semiconductor composing elements, thereby preventing occurence of crystal defects of the compound semicoinductor.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12410075A JPS5247675A (en) | 1975-10-14 | 1975-10-14 | Process for production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12410075A JPS5247675A (en) | 1975-10-14 | 1975-10-14 | Process for production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5247675A true JPS5247675A (en) | 1977-04-15 |
JPS544828B2 JPS544828B2 (en) | 1979-03-10 |
Family
ID=14876915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12410075A Granted JPS5247675A (en) | 1975-10-14 | 1975-10-14 | Process for production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5247675A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2397718A1 (en) * | 1977-07-15 | 1979-02-09 | Matsushita Electric Ind Co Ltd | PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES |
JPS5749239A (en) * | 1980-09-09 | 1982-03-23 | Toshiba Corp | Manufacture of gaas device |
JPS59121833A (en) * | 1982-12-27 | 1984-07-14 | Toshiba Corp | Manufacture of semiconductor device |
-
1975
- 1975-10-14 JP JP12410075A patent/JPS5247675A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2397718A1 (en) * | 1977-07-15 | 1979-02-09 | Matsushita Electric Ind Co Ltd | PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES |
JPS5749239A (en) * | 1980-09-09 | 1982-03-23 | Toshiba Corp | Manufacture of gaas device |
JPH0245332B2 (en) * | 1980-09-09 | 1990-10-09 | Tokyo Shibaura Electric Co | |
JPS59121833A (en) * | 1982-12-27 | 1984-07-14 | Toshiba Corp | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS544828B2 (en) | 1979-03-10 |
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