JPS5247675A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5247675A
JPS5247675A JP12410075A JP12410075A JPS5247675A JP S5247675 A JPS5247675 A JP S5247675A JP 12410075 A JP12410075 A JP 12410075A JP 12410075 A JP12410075 A JP 12410075A JP S5247675 A JPS5247675 A JP S5247675A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
compound semiconductor
semicoinductor
anneal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12410075A
Other languages
Japanese (ja)
Other versions
JPS544828B2 (en
Inventor
Takeshi Konuma
Toshio Sugawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12410075A priority Critical patent/JPS5247675A/en
Publication of JPS5247675A publication Critical patent/JPS5247675A/en
Publication of JPS544828B2 publication Critical patent/JPS544828B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To anneal a compound semiconductor by way of an insulating film containing compound semiconductor composing elements, thereby preventing occurence of crystal defects of the compound semicoinductor.
COPYRIGHT: (C)1977,JPO&Japio
JP12410075A 1975-10-14 1975-10-14 Process for production of semiconductor device Granted JPS5247675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12410075A JPS5247675A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12410075A JPS5247675A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5247675A true JPS5247675A (en) 1977-04-15
JPS544828B2 JPS544828B2 (en) 1979-03-10

Family

ID=14876915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12410075A Granted JPS5247675A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5247675A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2397718A1 (en) * 1977-07-15 1979-02-09 Matsushita Electric Ind Co Ltd PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES
JPS5749239A (en) * 1980-09-09 1982-03-23 Toshiba Corp Manufacture of gaas device
JPS59121833A (en) * 1982-12-27 1984-07-14 Toshiba Corp Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2397718A1 (en) * 1977-07-15 1979-02-09 Matsushita Electric Ind Co Ltd PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES
JPS5749239A (en) * 1980-09-09 1982-03-23 Toshiba Corp Manufacture of gaas device
JPH0245332B2 (en) * 1980-09-09 1990-10-09 Tokyo Shibaura Electric Co
JPS59121833A (en) * 1982-12-27 1984-07-14 Toshiba Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS544828B2 (en) 1979-03-10

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