JPS5242366A - Method of preventing occurence of crystal defects of silicon wafers - Google Patents

Method of preventing occurence of crystal defects of silicon wafers

Info

Publication number
JPS5242366A
JPS5242366A JP11814375A JP11814375A JPS5242366A JP S5242366 A JPS5242366 A JP S5242366A JP 11814375 A JP11814375 A JP 11814375A JP 11814375 A JP11814375 A JP 11814375A JP S5242366 A JPS5242366 A JP S5242366A
Authority
JP
Japan
Prior art keywords
silicon wafers
crystal defects
occurence
preventing
preventing occurence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11814375A
Other languages
Japanese (ja)
Inventor
Takanori Hayafuji
Seiji Kawato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP11814375A priority Critical patent/JPS5242366A/en
Publication of JPS5242366A publication Critical patent/JPS5242366A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To prevent occurence of crystal defects of silicon wafers.
COPYRIGHT: (C)1977,JPO&Japio
JP11814375A 1975-09-30 1975-09-30 Method of preventing occurence of crystal defects of silicon wafers Pending JPS5242366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11814375A JPS5242366A (en) 1975-09-30 1975-09-30 Method of preventing occurence of crystal defects of silicon wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11814375A JPS5242366A (en) 1975-09-30 1975-09-30 Method of preventing occurence of crystal defects of silicon wafers

Publications (1)

Publication Number Publication Date
JPS5242366A true JPS5242366A (en) 1977-04-01

Family

ID=14729125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11814375A Pending JPS5242366A (en) 1975-09-30 1975-09-30 Method of preventing occurence of crystal defects of silicon wafers

Country Status (1)

Country Link
JP (1) JPS5242366A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture

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