JPS5228274A - Containing method of wafer to magazine - Google Patents
Containing method of wafer to magazineInfo
- Publication number
- JPS5228274A JPS5228274A JP10399275A JP10399275A JPS5228274A JP S5228274 A JPS5228274 A JP S5228274A JP 10399275 A JP10399275 A JP 10399275A JP 10399275 A JP10399275 A JP 10399275A JP S5228274 A JPS5228274 A JP S5228274A
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- wafer
- containing method
- unloader
- loader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To be convenient on the process control by becoming to same for the contained state of loader and unloader after the process.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10399275A JPS5228274A (en) | 1975-08-29 | 1975-08-29 | Containing method of wafer to magazine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10399275A JPS5228274A (en) | 1975-08-29 | 1975-08-29 | Containing method of wafer to magazine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5228274A true JPS5228274A (en) | 1977-03-03 |
Family
ID=14368782
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10399275A Pending JPS5228274A (en) | 1975-08-29 | 1975-08-29 | Containing method of wafer to magazine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5228274A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5951657U (en) * | 1982-09-30 | 1984-04-05 | 日本電気ホームエレクトロニクス株式会社 | Shock absorber |
JPS60134425A (en) * | 1983-12-22 | 1985-07-17 | Toshiba Corp | Magnetic card for wafer process control and wafer process controlling method |
US4685852A (en) * | 1985-05-20 | 1987-08-11 | Machine Technology, Inc. | Process apparatus and method and elevator mechanism for use in connection therewith |
JPH01170013A (en) * | 1987-12-25 | 1989-07-05 | Teru Kyushu Kk | Wafer transfer method |
-
1975
- 1975-08-29 JP JP10399275A patent/JPS5228274A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5951657U (en) * | 1982-09-30 | 1984-04-05 | 日本電気ホームエレクトロニクス株式会社 | Shock absorber |
JPS632349Y2 (en) * | 1982-09-30 | 1988-01-21 | ||
JPS60134425A (en) * | 1983-12-22 | 1985-07-17 | Toshiba Corp | Magnetic card for wafer process control and wafer process controlling method |
US4685852A (en) * | 1985-05-20 | 1987-08-11 | Machine Technology, Inc. | Process apparatus and method and elevator mechanism for use in connection therewith |
JPH01170013A (en) * | 1987-12-25 | 1989-07-05 | Teru Kyushu Kk | Wafer transfer method |
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