JPS5247676A - Process for production of semiconductor device - Google Patents
Process for production of semiconductor deviceInfo
- Publication number
- JPS5247676A JPS5247676A JP12410175A JP12410175A JPS5247676A JP S5247676 A JPS5247676 A JP S5247676A JP 12410175 A JP12410175 A JP 12410175A JP 12410175 A JP12410175 A JP 12410175A JP S5247676 A JPS5247676 A JP S5247676A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- compound semiconductor
- protect
- crystal defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To protect the surface of a compound semiconductor with an oxide film and insulating film containing elements composing the compound semiconductor, thereby preventing occurence of crystal defects during annealing.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12410175A JPS5247676A (en) | 1975-10-14 | 1975-10-14 | Process for production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12410175A JPS5247676A (en) | 1975-10-14 | 1975-10-14 | Process for production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5247676A true JPS5247676A (en) | 1977-04-15 |
JPS5346668B2 JPS5346668B2 (en) | 1978-12-15 |
Family
ID=14876939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12410175A Granted JPS5247676A (en) | 1975-10-14 | 1975-10-14 | Process for production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5247676A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2397718A1 (en) * | 1977-07-15 | 1979-02-09 | Matsushita Electric Ind Co Ltd | PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES |
JPS6047428A (en) * | 1983-08-26 | 1985-03-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS62250635A (en) * | 1986-04-23 | 1987-10-31 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPH02256229A (en) * | 1989-03-29 | 1990-10-17 | Rohm Co Ltd | Manufacture of compound semiconductor device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55114487U (en) * | 1979-02-08 | 1980-08-12 | ||
JPS5916991U (en) * | 1982-07-23 | 1984-02-01 | 株式会社ワコ− | hot air drying box |
-
1975
- 1975-10-14 JP JP12410175A patent/JPS5247676A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2397718A1 (en) * | 1977-07-15 | 1979-02-09 | Matsushita Electric Ind Co Ltd | PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES |
JPS6047428A (en) * | 1983-08-26 | 1985-03-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS62250635A (en) * | 1986-04-23 | 1987-10-31 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPH02256229A (en) * | 1989-03-29 | 1990-10-17 | Rohm Co Ltd | Manufacture of compound semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5346668B2 (en) | 1978-12-15 |
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