JPS5247676A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5247676A
JPS5247676A JP12410175A JP12410175A JPS5247676A JP S5247676 A JPS5247676 A JP S5247676A JP 12410175 A JP12410175 A JP 12410175A JP 12410175 A JP12410175 A JP 12410175A JP S5247676 A JPS5247676 A JP S5247676A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
compound semiconductor
protect
crystal defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12410175A
Other languages
Japanese (ja)
Other versions
JPS5346668B2 (en
Inventor
Takeshi Konuma
Toshio Sugawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12410175A priority Critical patent/JPS5247676A/en
Publication of JPS5247676A publication Critical patent/JPS5247676A/en
Publication of JPS5346668B2 publication Critical patent/JPS5346668B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To protect the surface of a compound semiconductor with an oxide film and insulating film containing elements composing the compound semiconductor, thereby preventing occurence of crystal defects during annealing.
COPYRIGHT: (C)1977,JPO&Japio
JP12410175A 1975-10-14 1975-10-14 Process for production of semiconductor device Granted JPS5247676A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12410175A JPS5247676A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12410175A JPS5247676A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5247676A true JPS5247676A (en) 1977-04-15
JPS5346668B2 JPS5346668B2 (en) 1978-12-15

Family

ID=14876939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12410175A Granted JPS5247676A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5247676A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2397718A1 (en) * 1977-07-15 1979-02-09 Matsushita Electric Ind Co Ltd PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES
JPS6047428A (en) * 1983-08-26 1985-03-14 Fujitsu Ltd Manufacture of semiconductor device
JPS62250635A (en) * 1986-04-23 1987-10-31 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPH02256229A (en) * 1989-03-29 1990-10-17 Rohm Co Ltd Manufacture of compound semiconductor device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55114487U (en) * 1979-02-08 1980-08-12
JPS5916991U (en) * 1982-07-23 1984-02-01 株式会社ワコ− hot air drying box

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2397718A1 (en) * 1977-07-15 1979-02-09 Matsushita Electric Ind Co Ltd PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES
JPS6047428A (en) * 1983-08-26 1985-03-14 Fujitsu Ltd Manufacture of semiconductor device
JPS62250635A (en) * 1986-04-23 1987-10-31 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPH02256229A (en) * 1989-03-29 1990-10-17 Rohm Co Ltd Manufacture of compound semiconductor device

Also Published As

Publication number Publication date
JPS5346668B2 (en) 1978-12-15

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