JPS51113461A - A method for manufacturing semiconductor devices - Google Patents

A method for manufacturing semiconductor devices

Info

Publication number
JPS51113461A
JPS51113461A JP3781175A JP3781175A JPS51113461A JP S51113461 A JPS51113461 A JP S51113461A JP 3781175 A JP3781175 A JP 3781175A JP 3781175 A JP3781175 A JP 3781175A JP S51113461 A JPS51113461 A JP S51113461A
Authority
JP
Japan
Prior art keywords
semiconductor devices
manufacturing semiconductor
impurities
diffusion
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3781175A
Other languages
Japanese (ja)
Inventor
Tadashi Kirisako
Yoshito Ichinose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3781175A priority Critical patent/JPS51113461A/en
Publication of JPS51113461A publication Critical patent/JPS51113461A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: A polysilicon layer is formed between impurities diffusion source and substrate and diffusion handling is carried out, providing a low resistivity impurities range.
COPYRIGHT: (C)1976,JPO&Japio
JP3781175A 1975-03-31 1975-03-31 A method for manufacturing semiconductor devices Pending JPS51113461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3781175A JPS51113461A (en) 1975-03-31 1975-03-31 A method for manufacturing semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3781175A JPS51113461A (en) 1975-03-31 1975-03-31 A method for manufacturing semiconductor devices

Publications (1)

Publication Number Publication Date
JPS51113461A true JPS51113461A (en) 1976-10-06

Family

ID=12507888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3781175A Pending JPS51113461A (en) 1975-03-31 1975-03-31 A method for manufacturing semiconductor devices

Country Status (1)

Country Link
JP (1) JPS51113461A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118067U (en) * 1981-01-16 1982-07-22
JPS57118633A (en) * 1981-01-14 1982-07-23 Toshiba Corp Manufacture of semiconductor device
JPS58166717A (en) * 1982-03-27 1983-10-01 Fujitsu Ltd Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118633A (en) * 1981-01-14 1982-07-23 Toshiba Corp Manufacture of semiconductor device
JPS57118067U (en) * 1981-01-16 1982-07-22
JPS58166717A (en) * 1982-03-27 1983-10-01 Fujitsu Ltd Manufacture of semiconductor device

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