JPS51113461A - A method for manufacturing semiconductor devices - Google Patents
A method for manufacturing semiconductor devicesInfo
- Publication number
- JPS51113461A JPS51113461A JP3781175A JP3781175A JPS51113461A JP S51113461 A JPS51113461 A JP S51113461A JP 3781175 A JP3781175 A JP 3781175A JP 3781175 A JP3781175 A JP 3781175A JP S51113461 A JPS51113461 A JP S51113461A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor devices
- manufacturing semiconductor
- impurities
- diffusion
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: A polysilicon layer is formed between impurities diffusion source and substrate and diffusion handling is carried out, providing a low resistivity impurities range.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3781175A JPS51113461A (en) | 1975-03-31 | 1975-03-31 | A method for manufacturing semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3781175A JPS51113461A (en) | 1975-03-31 | 1975-03-31 | A method for manufacturing semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51113461A true JPS51113461A (en) | 1976-10-06 |
Family
ID=12507888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3781175A Pending JPS51113461A (en) | 1975-03-31 | 1975-03-31 | A method for manufacturing semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51113461A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57118067U (en) * | 1981-01-16 | 1982-07-22 | ||
JPS57118633A (en) * | 1981-01-14 | 1982-07-23 | Toshiba Corp | Manufacture of semiconductor device |
JPS58166717A (en) * | 1982-03-27 | 1983-10-01 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1975
- 1975-03-31 JP JP3781175A patent/JPS51113461A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57118633A (en) * | 1981-01-14 | 1982-07-23 | Toshiba Corp | Manufacture of semiconductor device |
JPS57118067U (en) * | 1981-01-16 | 1982-07-22 | ||
JPS58166717A (en) * | 1982-03-27 | 1983-10-01 | Fujitsu Ltd | Manufacture of semiconductor device |
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