JPS5260581A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5260581A
JPS5260581A JP13634175A JP13634175A JPS5260581A JP S5260581 A JPS5260581 A JP S5260581A JP 13634175 A JP13634175 A JP 13634175A JP 13634175 A JP13634175 A JP 13634175A JP S5260581 A JPS5260581 A JP S5260581A
Authority
JP
Japan
Prior art keywords
semiconductor device
isollation
insulating film
elements
side faces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13634175A
Other languages
Japanese (ja)
Inventor
Yutaka Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP13634175A priority Critical patent/JPS5260581A/en
Publication of JPS5260581A publication Critical patent/JPS5260581A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To obtain a semiconductor device which is so arranged that isollation between elements is performed by a groove provided on the surface of semiconductor crystal and an insulating film grown on its side faces.
COPYRIGHT: (C)1977,JPO&Japio
JP13634175A 1975-11-14 1975-11-14 Semiconductor device Pending JPS5260581A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13634175A JPS5260581A (en) 1975-11-14 1975-11-14 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13634175A JPS5260581A (en) 1975-11-14 1975-11-14 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5260581A true JPS5260581A (en) 1977-05-19

Family

ID=15172928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13634175A Pending JPS5260581A (en) 1975-11-14 1975-11-14 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5260581A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630737A (en) * 1979-08-21 1981-03-27 Seiko Epson Corp Semiconductor ic circuit
KR20190104434A (en) 2014-11-04 2019-09-09 미쯔비시 케미컬 주식회사 Porous electrode substrate, membrane/electrode assembly using same, and solid polymer fuel cell using same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914397A (en) * 1972-05-31 1974-02-07
JPS504513A (en) * 1973-04-09 1975-01-17
JPS5023277A (en) * 1973-06-29 1975-03-12

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914397A (en) * 1972-05-31 1974-02-07
JPS504513A (en) * 1973-04-09 1975-01-17
JPS5023277A (en) * 1973-06-29 1975-03-12

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630737A (en) * 1979-08-21 1981-03-27 Seiko Epson Corp Semiconductor ic circuit
JPH0147010B2 (en) * 1979-08-21 1989-10-12 Seiko Epson Corp
KR20190104434A (en) 2014-11-04 2019-09-09 미쯔비시 케미컬 주식회사 Porous electrode substrate, membrane/electrode assembly using same, and solid polymer fuel cell using same

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