JPS52101968A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS52101968A JPS52101968A JP1868376A JP1868376A JPS52101968A JP S52101968 A JPS52101968 A JP S52101968A JP 1868376 A JP1868376 A JP 1868376A JP 1868376 A JP1868376 A JP 1868376A JP S52101968 A JPS52101968 A JP S52101968A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- semiconductor device
- dispersion region
- impurities
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To reduce redistribution of impurities in the dispersion region in the preparation of oxidation film while forming dispersion region in a substrate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1868376A JPS52101968A (en) | 1976-02-23 | 1976-02-23 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1868376A JPS52101968A (en) | 1976-02-23 | 1976-02-23 | Preparation of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52101968A true JPS52101968A (en) | 1977-08-26 |
Family
ID=11978396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1868376A Pending JPS52101968A (en) | 1976-02-23 | 1976-02-23 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52101968A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6414915A (en) * | 1987-07-08 | 1989-01-19 | Nec Corp | Forming method for diffused well |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845176A (en) * | 1971-10-11 | 1973-06-28 |
-
1976
- 1976-02-23 JP JP1868376A patent/JPS52101968A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845176A (en) * | 1971-10-11 | 1973-06-28 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6414915A (en) * | 1987-07-08 | 1989-01-19 | Nec Corp | Forming method for diffused well |
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