JPS51147259A - Manufacturing process of semiconductor device - Google Patents

Manufacturing process of semiconductor device

Info

Publication number
JPS51147259A
JPS51147259A JP7082875A JP7082875A JPS51147259A JP S51147259 A JPS51147259 A JP S51147259A JP 7082875 A JP7082875 A JP 7082875A JP 7082875 A JP7082875 A JP 7082875A JP S51147259 A JPS51147259 A JP S51147259A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
film
nitric
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7082875A
Other languages
Japanese (ja)
Inventor
Mitsumasa Koyanagi
Yasuo Wada
Kikuji Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7082875A priority Critical patent/JPS51147259A/en
Publication of JPS51147259A publication Critical patent/JPS51147259A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To eliminate the effect of stress upon a substrate silicon due to a nitric film by the formation of nitric film and oxide film, or, oxide film and nitric film and oxide film.
COPYRIGHT: (C)1976,JPO&Japio
JP7082875A 1975-06-13 1975-06-13 Manufacturing process of semiconductor device Pending JPS51147259A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7082875A JPS51147259A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7082875A JPS51147259A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51147259A true JPS51147259A (en) 1976-12-17

Family

ID=13442816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7082875A Pending JPS51147259A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51147259A (en)

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