JPS5258372A - Semiconductor device and its production - Google Patents
Semiconductor device and its productionInfo
- Publication number
- JPS5258372A JPS5258372A JP13403575A JP13403575A JPS5258372A JP S5258372 A JPS5258372 A JP S5258372A JP 13403575 A JP13403575 A JP 13403575A JP 13403575 A JP13403575 A JP 13403575A JP S5258372 A JPS5258372 A JP S5258372A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- film
- sio
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To produce a highly moisture resistant device by forming an Al film on the SiO2 film on a substrate and forming SiO2 including an impurity of such a quantity that does not provide hygroscopicity between Al film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13403575A JPS5258372A (en) | 1975-11-10 | 1975-11-10 | Semiconductor device and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13403575A JPS5258372A (en) | 1975-11-10 | 1975-11-10 | Semiconductor device and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5258372A true JPS5258372A (en) | 1977-05-13 |
Family
ID=15118834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13403575A Pending JPS5258372A (en) | 1975-11-10 | 1975-11-10 | Semiconductor device and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258372A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5691453A (en) * | 1979-12-26 | 1981-07-24 | Hitachi Ltd | Manufacturing of semiconductor device |
-
1975
- 1975-11-10 JP JP13403575A patent/JPS5258372A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5691453A (en) * | 1979-12-26 | 1981-07-24 | Hitachi Ltd | Manufacturing of semiconductor device |
JPS6244690B2 (en) * | 1979-12-26 | 1987-09-22 | Hitachi Ltd |
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