JPS5258372A - Semiconductor device and its production - Google Patents

Semiconductor device and its production

Info

Publication number
JPS5258372A
JPS5258372A JP13403575A JP13403575A JPS5258372A JP S5258372 A JPS5258372 A JP S5258372A JP 13403575 A JP13403575 A JP 13403575A JP 13403575 A JP13403575 A JP 13403575A JP S5258372 A JPS5258372 A JP S5258372A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
film
sio
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13403575A
Other languages
Japanese (ja)
Inventor
Masato Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13403575A priority Critical patent/JPS5258372A/en
Publication of JPS5258372A publication Critical patent/JPS5258372A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To produce a highly moisture resistant device by forming an Al film on the SiO2 film on a substrate and forming SiO2 including an impurity of such a quantity that does not provide hygroscopicity between Al film.
COPYRIGHT: (C)1977,JPO&Japio
JP13403575A 1975-11-10 1975-11-10 Semiconductor device and its production Pending JPS5258372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13403575A JPS5258372A (en) 1975-11-10 1975-11-10 Semiconductor device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13403575A JPS5258372A (en) 1975-11-10 1975-11-10 Semiconductor device and its production

Publications (1)

Publication Number Publication Date
JPS5258372A true JPS5258372A (en) 1977-05-13

Family

ID=15118834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13403575A Pending JPS5258372A (en) 1975-11-10 1975-11-10 Semiconductor device and its production

Country Status (1)

Country Link
JP (1) JPS5258372A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691453A (en) * 1979-12-26 1981-07-24 Hitachi Ltd Manufacturing of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691453A (en) * 1979-12-26 1981-07-24 Hitachi Ltd Manufacturing of semiconductor device
JPS6244690B2 (en) * 1979-12-26 1987-09-22 Hitachi Ltd

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