JPS5261959A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5261959A
JPS5261959A JP13845375A JP13845375A JPS5261959A JP S5261959 A JPS5261959 A JP S5261959A JP 13845375 A JP13845375 A JP 13845375A JP 13845375 A JP13845375 A JP 13845375A JP S5261959 A JPS5261959 A JP S5261959A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
serrating
substrate
high stability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13845375A
Other languages
Japanese (ja)
Inventor
Hiroo Naganuma
Tetsuo Fujimaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13845375A priority Critical patent/JPS5261959A/en
Publication of JPS5261959A publication Critical patent/JPS5261959A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form an evaporation layer across the serrating part of a substrate at high stability.
COPYRIGHT: (C)1977,JPO&Japio
JP13845375A 1975-11-18 1975-11-18 Production of semiconductor device Pending JPS5261959A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13845375A JPS5261959A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13845375A JPS5261959A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5261959A true JPS5261959A (en) 1977-05-21

Family

ID=15222355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13845375A Pending JPS5261959A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5261959A (en)

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