JPS5380966A - Manufacture of electrode fdr semiconductor device - Google Patents

Manufacture of electrode fdr semiconductor device

Info

Publication number
JPS5380966A
JPS5380966A JP15650376A JP15650376A JPS5380966A JP S5380966 A JPS5380966 A JP S5380966A JP 15650376 A JP15650376 A JP 15650376A JP 15650376 A JP15650376 A JP 15650376A JP S5380966 A JPS5380966 A JP S5380966A
Authority
JP
Japan
Prior art keywords
electrode
fdr
semiconductor
manufacture
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15650376A
Other languages
Japanese (ja)
Inventor
Hiroshi Kato
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15650376A priority Critical patent/JPS5380966A/en
Publication of JPS5380966A publication Critical patent/JPS5380966A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce an electrode featuring a high performance and a high reliability by using a double film of Ti thin film and Al film for the electrode material.
COPYRIGHT: (C)1978,JPO&Japio
JP15650376A 1976-12-27 1976-12-27 Manufacture of electrode fdr semiconductor device Pending JPS5380966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15650376A JPS5380966A (en) 1976-12-27 1976-12-27 Manufacture of electrode fdr semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15650376A JPS5380966A (en) 1976-12-27 1976-12-27 Manufacture of electrode fdr semiconductor device

Publications (1)

Publication Number Publication Date
JPS5380966A true JPS5380966A (en) 1978-07-17

Family

ID=15629174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15650376A Pending JPS5380966A (en) 1976-12-27 1976-12-27 Manufacture of electrode fdr semiconductor device

Country Status (1)

Country Link
JP (1) JPS5380966A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5566084U (en) * 1978-10-30 1980-05-07
JPS5583253A (en) * 1978-12-19 1980-06-23 Fujitsu Ltd Semiconductor device
JPS5745228A (en) * 1980-08-29 1982-03-15 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS6046024A (en) * 1983-08-24 1985-03-12 Toshiba Corp Manufacture of semiconductor device
JPS60152171A (en) * 1984-01-19 1985-08-10 Kyocera Corp Reader
JPS6261358A (en) * 1985-09-11 1987-03-18 Mitsubishi Electric Corp Semiconductor device
JPS6271271A (en) * 1985-09-24 1987-04-01 Sharp Corp Electrode structure of silicon carbide semiconductor
JPH0228955A (en) * 1988-03-07 1990-01-31 Internatl Business Mach Corp <Ibm> Multilayered wiring layer forming method
JPH05198790A (en) * 1992-11-20 1993-08-06 Mitsubishi Electric Corp Semiconductor device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5566084U (en) * 1978-10-30 1980-05-07
JPS5583253A (en) * 1978-12-19 1980-06-23 Fujitsu Ltd Semiconductor device
JPS5923474B2 (en) * 1978-12-19 1984-06-02 Fujitsu Ltd
JPS5745228A (en) * 1980-08-29 1982-03-15 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS6046024A (en) * 1983-08-24 1985-03-12 Toshiba Corp Manufacture of semiconductor device
JPH0562456B2 (en) * 1983-08-24 1993-09-08 Tokyo Shibaura Electric Co
JPS60152171A (en) * 1984-01-19 1985-08-10 Kyocera Corp Reader
JPS6261358A (en) * 1985-09-11 1987-03-18 Mitsubishi Electric Corp Semiconductor device
JPS6271271A (en) * 1985-09-24 1987-04-01 Sharp Corp Electrode structure of silicon carbide semiconductor
JPH0582991B2 (en) * 1985-09-24 1993-11-24 Sharp Kk
JPH0228955A (en) * 1988-03-07 1990-01-31 Internatl Business Mach Corp <Ibm> Multilayered wiring layer forming method
JPH05198790A (en) * 1992-11-20 1993-08-06 Mitsubishi Electric Corp Semiconductor device

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