JPS5566084U - - Google Patents
Info
- Publication number
- JPS5566084U JPS5566084U JP14934678U JP14934678U JPS5566084U JP S5566084 U JPS5566084 U JP S5566084U JP 14934678 U JP14934678 U JP 14934678U JP 14934678 U JP14934678 U JP 14934678U JP S5566084 U JPS5566084 U JP S5566084U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14934678U JPS5566084U (en) | 1978-10-30 | 1978-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14934678U JPS5566084U (en) | 1978-10-30 | 1978-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5566084U true JPS5566084U (en) | 1980-05-07 |
Family
ID=29132577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14934678U Pending JPS5566084U (en) | 1978-10-30 | 1978-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5566084U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5380966A (en) * | 1976-12-27 | 1978-07-17 | Hitachi Ltd | Manufacture of electrode fdr semiconductor device |
| JPS53115187A (en) * | 1977-03-18 | 1978-10-07 | Toshiba Corp | Semiconductor device |
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1978
- 1978-10-30 JP JP14934678U patent/JPS5566084U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5380966A (en) * | 1976-12-27 | 1978-07-17 | Hitachi Ltd | Manufacture of electrode fdr semiconductor device |
| JPS53115187A (en) * | 1977-03-18 | 1978-10-07 | Toshiba Corp | Semiconductor device |