JPS5251880A - Moisture sensitive element - Google Patents

Moisture sensitive element

Info

Publication number
JPS5251880A
JPS5251880A JP50127683A JP12768375A JPS5251880A JP S5251880 A JPS5251880 A JP S5251880A JP 50127683 A JP50127683 A JP 50127683A JP 12768375 A JP12768375 A JP 12768375A JP S5251880 A JPS5251880 A JP S5251880A
Authority
JP
Japan
Prior art keywords
sensitive element
moisture sensitive
electrodes
covering
produce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50127683A
Other languages
Japanese (ja)
Inventor
Takehiro Tozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50127683A priority Critical patent/JPS5251880A/en
Publication of JPS5251880A publication Critical patent/JPS5251880A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce a moisture sensitive element having stable characteristics by covering the surface between electrodes on a semiconductor substrate with a hygroscopic high-molecular film.
COPYRIGHT: (C)1977,JPO&Japio
JP50127683A 1975-10-22 1975-10-22 Moisture sensitive element Pending JPS5251880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50127683A JPS5251880A (en) 1975-10-22 1975-10-22 Moisture sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50127683A JPS5251880A (en) 1975-10-22 1975-10-22 Moisture sensitive element

Publications (1)

Publication Number Publication Date
JPS5251880A true JPS5251880A (en) 1977-04-26

Family

ID=14966115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50127683A Pending JPS5251880A (en) 1975-10-22 1975-10-22 Moisture sensitive element

Country Status (1)

Country Link
JP (1) JPS5251880A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4481813A (en) * 1981-10-28 1984-11-13 Hitachi, Ltd. Dew sensor
JPS6085358A (en) * 1983-08-19 1985-05-14 イ−エムアイ・リミテツド Moisture sensitive element and manufacture thereof
US10942070B2 (en) * 2018-05-21 2021-03-09 Haesung Ds Co., Ltd. Sensor unit, temperature sensor including the same, method of manufacturing the sensor unit, and method of manufacturing the temperature sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4481813A (en) * 1981-10-28 1984-11-13 Hitachi, Ltd. Dew sensor
JPS6085358A (en) * 1983-08-19 1985-05-14 イ−エムアイ・リミテツド Moisture sensitive element and manufacture thereof
JPH0240973B2 (en) * 1983-08-19 1990-09-14 Soon Ii Emu Ai Plc
US10942070B2 (en) * 2018-05-21 2021-03-09 Haesung Ds Co., Ltd. Sensor unit, temperature sensor including the same, method of manufacturing the sensor unit, and method of manufacturing the temperature sensor

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