JPS51127681A - Manufacturing process of semiconductor device - Google Patents

Manufacturing process of semiconductor device

Info

Publication number
JPS51127681A
JPS51127681A JP5152075A JP5152075A JPS51127681A JP S51127681 A JPS51127681 A JP S51127681A JP 5152075 A JP5152075 A JP 5152075A JP 5152075 A JP5152075 A JP 5152075A JP S51127681 A JPS51127681 A JP S51127681A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
window
bipolar transistor
making process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5152075A
Other languages
Japanese (ja)
Other versions
JPS5615590B2 (en
Inventor
Katsuyuki Inayoshi
Yoshinobu Monma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5152075A priority Critical patent/JPS51127681A/en
Publication of JPS51127681A publication Critical patent/JPS51127681A/en
Publication of JPS5615590B2 publication Critical patent/JPS5615590B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent occurrence of the undercut phenomenon in the window-making process for manufacturing bipolar transistor by using no multi-structure masking material composed of the dioxide silicon film and nitride film.
COPYRIGHT: (C)1976,JPO&Japio
JP5152075A 1975-04-30 1975-04-30 Manufacturing process of semiconductor device Granted JPS51127681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5152075A JPS51127681A (en) 1975-04-30 1975-04-30 Manufacturing process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5152075A JPS51127681A (en) 1975-04-30 1975-04-30 Manufacturing process of semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP311982A Division JPS57136366A (en) 1982-01-11 1982-01-11 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS51127681A true JPS51127681A (en) 1976-11-06
JPS5615590B2 JPS5615590B2 (en) 1981-04-10

Family

ID=12889275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5152075A Granted JPS51127681A (en) 1975-04-30 1975-04-30 Manufacturing process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51127681A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860569A (en) * 1981-10-06 1983-04-11 Fujitsu Ltd Semiconductor device
JPS60218873A (en) * 1984-04-13 1985-11-01 Rohm Co Ltd Manufacture of semiconductor device

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584285A (en) * 1981-06-30 1983-01-11 帝国ピストンリング株式会社 Panel far infrared heater
JPS61116222A (en) * 1984-11-13 1986-06-03 Matsushita Electric Ind Co Ltd Electric stove
JPS61116223A (en) * 1984-11-13 1986-06-03 Matsushita Electric Ind Co Ltd Electric stove
JPS61143636A (en) * 1984-12-18 1986-07-01 Matsushita Electric Ind Co Ltd Electric stove
JPS61143637A (en) * 1984-12-18 1986-07-01 Matsushita Electric Ind Co Ltd Electric stove
JPS61143635A (en) * 1984-12-18 1986-07-01 Matsushita Electric Ind Co Ltd Electric stove
JPS6222918A (en) * 1985-07-23 1987-01-31 Matsushita Electric Ind Co Ltd Electric heater
JPS6222919A (en) * 1985-07-23 1987-01-31 Matsushita Electric Ind Co Ltd Heater
JPS63213726A (en) * 1987-03-02 1988-09-06 Matsushita Electric Ind Co Ltd Electric stove
JPS6323103A (en) * 1987-05-27 1988-01-30 Yokohama Rubber Co Ltd:The Method and device for condensing light
JPS63178472A (en) * 1987-07-03 1988-07-22 横浜ゴム株式会社 Heater

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860569A (en) * 1981-10-06 1983-04-11 Fujitsu Ltd Semiconductor device
JPS60218873A (en) * 1984-04-13 1985-11-01 Rohm Co Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5615590B2 (en) 1981-04-10

Similar Documents

Publication Publication Date Title
JPS51127682A (en) Manufacturing process of semiconductor device
JPS51135373A (en) Semiconductor device
JPS51127681A (en) Manufacturing process of semiconductor device
JPS53124087A (en) Manufacture of semiconductor device
JPS5253673A (en) Device and production for semiconductor
JPS5230167A (en) Method for production of semiconductor device
JPS5338271A (en) Semiconductor device
JPS5272586A (en) Production of semiconductor device
JPS5228879A (en) Semiconductor device and method for its production
JPS52117582A (en) Mos type semiconductor device
JPS51140572A (en) Semiconductor device
JPS5261960A (en) Production of semiconductor device
JPS51145267A (en) Manufacture of semiconductor device
JPS525700A (en) The process for production of silicon nitride
JPS5317284A (en) Production of semiconductor device
JPS51123073A (en) Insulated gate (type) semiconductor device
JPS52179A (en) Method of fabricating semiconductor
JPS5273673A (en) Production of semiconductor device
JPS5329082A (en) Semiconductor device
JPS5269266A (en) Production of semiconductor device
JPS51118960A (en) Wafer form semiconductor doping material
JPS51147276A (en) Semiconductor device
JPS5379372A (en) Production of silicon semoconductor device
JPS51147272A (en) Manufacturing process of mis-type field effect transistor
JPS5211867A (en) Manufacturing method of a semiconductor device