JPS51147276A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS51147276A
JPS51147276A JP7174475A JP7174475A JPS51147276A JP S51147276 A JPS51147276 A JP S51147276A JP 7174475 A JP7174475 A JP 7174475A JP 7174475 A JP7174475 A JP 7174475A JP S51147276 A JPS51147276 A JP S51147276A
Authority
JP
Japan
Prior art keywords
semiconductor device
compose
photo
cycles
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7174475A
Other languages
Japanese (ja)
Inventor
Toshio Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7174475A priority Critical patent/JPS51147276A/en
Publication of JPS51147276A publication Critical patent/JPS51147276A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To compose a MOST with high density and process precision of a field oxide film by four cycles of photo-resist process as in the case with the flat MOS process.
COPYRIGHT: (C)1976,JPO&Japio
JP7174475A 1975-06-13 1975-06-13 Semiconductor device Pending JPS51147276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7174475A JPS51147276A (en) 1975-06-13 1975-06-13 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7174475A JPS51147276A (en) 1975-06-13 1975-06-13 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS51147276A true JPS51147276A (en) 1976-12-17

Family

ID=13469327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7174475A Pending JPS51147276A (en) 1975-06-13 1975-06-13 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS51147276A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55111178A (en) * 1979-02-20 1980-08-27 Mitsubishi Electric Corp Field-effect semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55111178A (en) * 1979-02-20 1980-08-27 Mitsubishi Electric Corp Field-effect semiconductor device

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