JPS5359368A - Plasma etching - Google Patents
Plasma etchingInfo
- Publication number
- JPS5359368A JPS5359368A JP13404576A JP13404576A JPS5359368A JP S5359368 A JPS5359368 A JP S5359368A JP 13404576 A JP13404576 A JP 13404576A JP 13404576 A JP13404576 A JP 13404576A JP S5359368 A JPS5359368 A JP S5359368A
- Authority
- JP
- Japan
- Prior art keywords
- plasma etching
- plasma
- specially
- organic compound
- including organic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Treatment Of Glass (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To perform minute processing by plasma-etching PSG films in an atmosphere including organic compound having specially F, H and O.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13404576A JPS5359368A (en) | 1976-11-10 | 1976-11-10 | Plasma etching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13404576A JPS5359368A (en) | 1976-11-10 | 1976-11-10 | Plasma etching |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5359368A true JPS5359368A (en) | 1978-05-29 |
Family
ID=15119067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13404576A Pending JPS5359368A (en) | 1976-11-10 | 1976-11-10 | Plasma etching |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5359368A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945946A (en) * | 1982-09-06 | 1984-03-15 | Toyota Central Res & Dev Lab Inc | Manufacture of porous hollow glass fiber |
JPS59111562U (en) * | 1983-05-14 | 1984-07-27 | 石川 四郎 | bench |
JPS6077429A (en) * | 1983-10-04 | 1985-05-02 | Asahi Glass Co Ltd | Dry etching method |
-
1976
- 1976-11-10 JP JP13404576A patent/JPS5359368A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945946A (en) * | 1982-09-06 | 1984-03-15 | Toyota Central Res & Dev Lab Inc | Manufacture of porous hollow glass fiber |
JPS6257588B2 (en) * | 1982-09-06 | 1987-12-01 | Toyoda Chuo Kenkyusho Kk | |
JPS59111562U (en) * | 1983-05-14 | 1984-07-27 | 石川 四郎 | bench |
JPS6077429A (en) * | 1983-10-04 | 1985-05-02 | Asahi Glass Co Ltd | Dry etching method |
JPH0343776B2 (en) * | 1983-10-04 | 1991-07-03 | Asahi Garasu Kk |
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