JPS5353964A - Electrode forming method of semiconductor device - Google Patents

Electrode forming method of semiconductor device

Info

Publication number
JPS5353964A
JPS5353964A JP12820776A JP12820776A JPS5353964A JP S5353964 A JPS5353964 A JP S5353964A JP 12820776 A JP12820776 A JP 12820776A JP 12820776 A JP12820776 A JP 12820776A JP S5353964 A JPS5353964 A JP S5353964A
Authority
JP
Japan
Prior art keywords
semiconductor device
forming method
electrode forming
exposing
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12820776A
Other languages
Japanese (ja)
Inventor
Genichi Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12820776A priority Critical patent/JPS5353964A/en
Publication of JPS5353964A publication Critical patent/JPS5353964A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To form a protecting film against water by exposing Al electrode surfaces to an O2 plasma atmosphere and forming Al2O3 films on the surface.
COPYRIGHT: (C)1978,JPO&Japio
JP12820776A 1976-10-27 1976-10-27 Electrode forming method of semiconductor device Pending JPS5353964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12820776A JPS5353964A (en) 1976-10-27 1976-10-27 Electrode forming method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12820776A JPS5353964A (en) 1976-10-27 1976-10-27 Electrode forming method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5353964A true JPS5353964A (en) 1978-05-16

Family

ID=14979120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12820776A Pending JPS5353964A (en) 1976-10-27 1976-10-27 Electrode forming method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5353964A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8377832B2 (en) * 2008-09-05 2013-02-19 Mitsubishi Electric Corporation Method for manufacturing semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8377832B2 (en) * 2008-09-05 2013-02-19 Mitsubishi Electric Corporation Method for manufacturing semiconductor device

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