JPS5367362A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5367362A
JPS5367362A JP14254176A JP14254176A JPS5367362A JP S5367362 A JPS5367362 A JP S5367362A JP 14254176 A JP14254176 A JP 14254176A JP 14254176 A JP14254176 A JP 14254176A JP S5367362 A JPS5367362 A JP S5367362A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
oxidizing
occurring
active
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14254176A
Other languages
Japanese (ja)
Inventor
Takaharu Nawata
Kunihiko Wada
Yoshiiku Togei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14254176A priority Critical patent/JPS5367362A/en
Publication of JPS5367362A publication Critical patent/JPS5367362A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To almost eliminate grid defect, O,S, etc., occurring in a manufacturing process by performing a heat treatment in an active-gas atmosphere before heat-oxidizing a silicon semiconductor substrate and forming an oxided film on the surface.
COPYRIGHT: (C)1978,JPO&Japio
JP14254176A 1976-11-27 1976-11-27 Manufacture of semiconductor device Pending JPS5367362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14254176A JPS5367362A (en) 1976-11-27 1976-11-27 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14254176A JPS5367362A (en) 1976-11-27 1976-11-27 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5367362A true JPS5367362A (en) 1978-06-15

Family

ID=15317741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14254176A Pending JPS5367362A (en) 1976-11-27 1976-11-27 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5367362A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03233936A (en) * 1990-02-08 1991-10-17 Mitsubishi Materials Corp Manufacture of silicon wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03233936A (en) * 1990-02-08 1991-10-17 Mitsubishi Materials Corp Manufacture of silicon wafer

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