JPS5317073A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5317073A JPS5317073A JP9110676A JP9110676A JPS5317073A JP S5317073 A JPS5317073 A JP S5317073A JP 9110676 A JP9110676 A JP 9110676A JP 9110676 A JP9110676 A JP 9110676A JP S5317073 A JPS5317073 A JP S5317073A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- point defects
- wafer
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To absorb the point defects having originally existed in a wafer and the point defects to be introduced during processing and evade the degradation in characteristics by depositing a thin film on the surface opposite to the element forming surface of the semiconductor wafer and beforehand producing crystal defects of less introduction of contaminations on said surface through heat treatment.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9110676A JPS5317073A (en) | 1976-07-30 | 1976-07-30 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9110676A JPS5317073A (en) | 1976-07-30 | 1976-07-30 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5317073A true JPS5317073A (en) | 1978-02-16 |
Family
ID=14017264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9110676A Pending JPS5317073A (en) | 1976-07-30 | 1976-07-30 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5317073A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5878671A (en) * | 1981-11-04 | 1983-05-12 | フジ産興株式会社 | Pulse type electric treating device |
JPH06338506A (en) * | 1993-05-28 | 1994-12-06 | Nec Corp | Semiconductor substrate and manufacture thereof |
-
1976
- 1976-07-30 JP JP9110676A patent/JPS5317073A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5878671A (en) * | 1981-11-04 | 1983-05-12 | フジ産興株式会社 | Pulse type electric treating device |
JPS5858101B2 (en) * | 1981-11-04 | 1983-12-23 | フジ産興株式会社 | Pulse electric therapy device |
JPH06338506A (en) * | 1993-05-28 | 1994-12-06 | Nec Corp | Semiconductor substrate and manufacture thereof |
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