JPS5317073A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5317073A
JPS5317073A JP9110676A JP9110676A JPS5317073A JP S5317073 A JPS5317073 A JP S5317073A JP 9110676 A JP9110676 A JP 9110676A JP 9110676 A JP9110676 A JP 9110676A JP S5317073 A JPS5317073 A JP S5317073A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
point defects
wafer
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9110676A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9110676A priority Critical patent/JPS5317073A/en
Publication of JPS5317073A publication Critical patent/JPS5317073A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To absorb the point defects having originally existed in a wafer and the point defects to be introduced during processing and evade the degradation in characteristics by depositing a thin film on the surface opposite to the element forming surface of the semiconductor wafer and beforehand producing crystal defects of less introduction of contaminations on said surface through heat treatment.
COPYRIGHT: (C)1978,JPO&Japio
JP9110676A 1976-07-30 1976-07-30 Production of semiconductor device Pending JPS5317073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9110676A JPS5317073A (en) 1976-07-30 1976-07-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9110676A JPS5317073A (en) 1976-07-30 1976-07-30 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5317073A true JPS5317073A (en) 1978-02-16

Family

ID=14017264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9110676A Pending JPS5317073A (en) 1976-07-30 1976-07-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5317073A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878671A (en) * 1981-11-04 1983-05-12 フジ産興株式会社 Pulse type electric treating device
JPH06338506A (en) * 1993-05-28 1994-12-06 Nec Corp Semiconductor substrate and manufacture thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878671A (en) * 1981-11-04 1983-05-12 フジ産興株式会社 Pulse type electric treating device
JPS5858101B2 (en) * 1981-11-04 1983-12-23 フジ産興株式会社 Pulse electric therapy device
JPH06338506A (en) * 1993-05-28 1994-12-06 Nec Corp Semiconductor substrate and manufacture thereof

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