JPS5375758A - Heat processing method of semiconductor device - Google Patents

Heat processing method of semiconductor device

Info

Publication number
JPS5375758A
JPS5375758A JP15153476A JP15153476A JPS5375758A JP S5375758 A JPS5375758 A JP S5375758A JP 15153476 A JP15153476 A JP 15153476A JP 15153476 A JP15153476 A JP 15153476A JP S5375758 A JPS5375758 A JP S5375758A
Authority
JP
Japan
Prior art keywords
semiconductor device
processing method
heat processing
defect
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15153476A
Other languages
Japanese (ja)
Inventor
Masahiko Nakamae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15153476A priority Critical patent/JPS5375758A/en
Publication of JPS5375758A publication Critical patent/JPS5375758A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To reduce the manufacturing time, by making heat treatment with comparatively low temperature and in a short time, and by preventing the defect of crystal.
COPYRIGHT: (C)1978,JPO&Japio
JP15153476A 1976-12-16 1976-12-16 Heat processing method of semiconductor device Pending JPS5375758A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15153476A JPS5375758A (en) 1976-12-16 1976-12-16 Heat processing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15153476A JPS5375758A (en) 1976-12-16 1976-12-16 Heat processing method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5375758A true JPS5375758A (en) 1978-07-05

Family

ID=15520606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15153476A Pending JPS5375758A (en) 1976-12-16 1976-12-16 Heat processing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5375758A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62108576A (en) * 1985-11-06 1987-05-19 Mitsubishi Electric Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62108576A (en) * 1985-11-06 1987-05-19 Mitsubishi Electric Corp Manufacture of semiconductor device

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