JPS52104473A - Control method for crystal growth - Google Patents

Control method for crystal growth

Info

Publication number
JPS52104473A
JPS52104473A JP2142176A JP2142176A JPS52104473A JP S52104473 A JPS52104473 A JP S52104473A JP 2142176 A JP2142176 A JP 2142176A JP 2142176 A JP2142176 A JP 2142176A JP S52104473 A JPS52104473 A JP S52104473A
Authority
JP
Japan
Prior art keywords
growth
control method
crystal growth
stem part
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2142176A
Other languages
Japanese (ja)
Inventor
Toru Sato
Hisao Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2142176A priority Critical patent/JPS52104473A/en
Publication of JPS52104473A publication Critical patent/JPS52104473A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To make it possible to control formation of crystla shoulder part as well as growth of stem part by automatically control treatment temperature in both processes of growth of stem part during growth of crystal and slow cooling after the completion of growth in succession.
COPYRIGHT: (C)1977,JPO&Japio
JP2142176A 1976-02-28 1976-02-28 Control method for crystal growth Pending JPS52104473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2142176A JPS52104473A (en) 1976-02-28 1976-02-28 Control method for crystal growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2142176A JPS52104473A (en) 1976-02-28 1976-02-28 Control method for crystal growth

Publications (1)

Publication Number Publication Date
JPS52104473A true JPS52104473A (en) 1977-09-01

Family

ID=12054526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2142176A Pending JPS52104473A (en) 1976-02-28 1976-02-28 Control method for crystal growth

Country Status (1)

Country Link
JP (1) JPS52104473A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5692195A (en) * 1979-12-25 1981-07-25 Fujitsu Ltd Automatic growing device of single crystal
WO1983002464A1 (en) * 1982-01-04 1983-07-21 Seymour, Robert, Stephen Diameter control in czochralski crystal growth
JPS63159288A (en) * 1986-12-23 1988-07-02 Toshiba Corp Production of single crystal

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50128685A (en) * 1974-03-29 1975-10-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50128685A (en) * 1974-03-29 1975-10-09

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5692195A (en) * 1979-12-25 1981-07-25 Fujitsu Ltd Automatic growing device of single crystal
WO1983002464A1 (en) * 1982-01-04 1983-07-21 Seymour, Robert, Stephen Diameter control in czochralski crystal growth
US4565598A (en) * 1982-01-04 1986-01-21 The Commonwealth Of Australia Method and apparatus for controlling diameter in Czochralski crystal growth by measuring crystal weight and crystal-melt interface temperature
JPS63159288A (en) * 1986-12-23 1988-07-02 Toshiba Corp Production of single crystal

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