JPS52104473A - Control method for crystal growth - Google Patents
Control method for crystal growthInfo
- Publication number
- JPS52104473A JPS52104473A JP2142176A JP2142176A JPS52104473A JP S52104473 A JPS52104473 A JP S52104473A JP 2142176 A JP2142176 A JP 2142176A JP 2142176 A JP2142176 A JP 2142176A JP S52104473 A JPS52104473 A JP S52104473A
- Authority
- JP
- Japan
- Prior art keywords
- growth
- control method
- crystal growth
- stem part
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To make it possible to control formation of crystla shoulder part as well as growth of stem part by automatically control treatment temperature in both processes of growth of stem part during growth of crystal and slow cooling after the completion of growth in succession.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2142176A JPS52104473A (en) | 1976-02-28 | 1976-02-28 | Control method for crystal growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2142176A JPS52104473A (en) | 1976-02-28 | 1976-02-28 | Control method for crystal growth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52104473A true JPS52104473A (en) | 1977-09-01 |
Family
ID=12054526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2142176A Pending JPS52104473A (en) | 1976-02-28 | 1976-02-28 | Control method for crystal growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52104473A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5692195A (en) * | 1979-12-25 | 1981-07-25 | Fujitsu Ltd | Automatic growing device of single crystal |
WO1983002464A1 (en) * | 1982-01-04 | 1983-07-21 | Seymour, Robert, Stephen | Diameter control in czochralski crystal growth |
JPS63159288A (en) * | 1986-12-23 | 1988-07-02 | Toshiba Corp | Production of single crystal |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50128685A (en) * | 1974-03-29 | 1975-10-09 |
-
1976
- 1976-02-28 JP JP2142176A patent/JPS52104473A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50128685A (en) * | 1974-03-29 | 1975-10-09 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5692195A (en) * | 1979-12-25 | 1981-07-25 | Fujitsu Ltd | Automatic growing device of single crystal |
WO1983002464A1 (en) * | 1982-01-04 | 1983-07-21 | Seymour, Robert, Stephen | Diameter control in czochralski crystal growth |
US4565598A (en) * | 1982-01-04 | 1986-01-21 | The Commonwealth Of Australia | Method and apparatus for controlling diameter in Czochralski crystal growth by measuring crystal weight and crystal-melt interface temperature |
JPS63159288A (en) * | 1986-12-23 | 1988-07-02 | Toshiba Corp | Production of single crystal |
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