JPS5387164A - Heat traetment method of compound crystal - Google Patents

Heat traetment method of compound crystal

Info

Publication number
JPS5387164A
JPS5387164A JP205677A JP205677A JPS5387164A JP S5387164 A JPS5387164 A JP S5387164A JP 205677 A JP205677 A JP 205677A JP 205677 A JP205677 A JP 205677A JP S5387164 A JPS5387164 A JP S5387164A
Authority
JP
Japan
Prior art keywords
traetment
heat
compound crystal
gaas
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP205677A
Other languages
Japanese (ja)
Other versions
JPS5927094B2 (en
Inventor
Kozo Ariga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP205677A priority Critical patent/JPS5927094B2/en
Publication of JPS5387164A publication Critical patent/JPS5387164A/en
Publication of JPS5927094B2 publication Critical patent/JPS5927094B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To perform the reduction in defects and activation in impurity after ion implantation by protecting the surfaces of GaAs with SiO2 and heat treating the GaAs in an As saturated solution of Ga.
COPYRIGHT: (C)1978,JPO&Japio
JP205677A 1977-01-11 1977-01-11 Heat treatment method for compound crystals Expired JPS5927094B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP205677A JPS5927094B2 (en) 1977-01-11 1977-01-11 Heat treatment method for compound crystals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP205677A JPS5927094B2 (en) 1977-01-11 1977-01-11 Heat treatment method for compound crystals

Publications (2)

Publication Number Publication Date
JPS5387164A true JPS5387164A (en) 1978-08-01
JPS5927094B2 JPS5927094B2 (en) 1984-07-03

Family

ID=11518670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP205677A Expired JPS5927094B2 (en) 1977-01-11 1977-01-11 Heat treatment method for compound crystals

Country Status (1)

Country Link
JP (1) JPS5927094B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57185952A (en) * 1982-03-05 1982-11-16 Taiho Kogyo Co Ltd Al-sn alloy for bearing and bearing device
JPS58151016A (en) * 1982-03-03 1983-09-08 Nippon Telegr & Teleph Corp <Ntt> Thermal treatment for chemical compound semiconductor component

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58151016A (en) * 1982-03-03 1983-09-08 Nippon Telegr & Teleph Corp <Ntt> Thermal treatment for chemical compound semiconductor component
JPS6332252B2 (en) * 1982-03-03 1988-06-29 Nippon Telegraph & Telephone
JPS57185952A (en) * 1982-03-05 1982-11-16 Taiho Kogyo Co Ltd Al-sn alloy for bearing and bearing device
JPS6140298B2 (en) * 1982-03-05 1986-09-08 Taiho Kogyo Co Ltd

Also Published As

Publication number Publication date
JPS5927094B2 (en) 1984-07-03

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